Models 947, 948 and 960 Leak Detectors Operations and Service Manual
B-16
B.4.1.1 Removing the Wet System Rough Pump
To perform this procedure:
1. Disconnect the mains power supply and make sure that all pumps are off.
WARNING
Disconnect power from the 947/948/960 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
CAUTION
Models 948/960 only:
Remove, empty, and clean the cold trap
whenever power is removed. Refer to “Liquid Nitrogen Cold
Trap (Models 948/960 only)” on page 4-10.
2. Remove the front panel.
3. Remove the right side panel.
4. Disconnect the pump power plug from the 947/948/960.
5. Drain the oil according to the pump manual instructions.
6. If you are replacing the pump as part of a Varian exchange program, return it in
accordance with the program, or discard it in accordance with all applicable
regulations.
NOTE
Varian Vacuum Technologies will not accept any part for return
without both a properly completed Return Materials
Authorization (RMA) and a Health and Safety Data Sheet.
Contact Customer Service at 1-800-8VARIAN to obtain an RMA
and a Health and Safety Data Sheet.
7. Remove the NW25 clamp from the left manifold (Figure B-11).
Figure B-11
Rough Pump Manifold and Exhaust Connections
Exhaust Connection
Manifold Connection
NW25 Clamp
NW16 Clamp
Summary of Contents for 948
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