page 68 of 70
Health and safety clearance form
1. Device (Model): ................................................................... 2. Serial no.: .........................................
3. Reason for return / malfunction:
..............................................................................................................................................................
4. Has the device been used in a copper process step (e.g., semiconductor production).
☐
yes
☐
no
5. Substances (gases, liquids, solids) in contact with the device / which have been pumped:
..............................................................................................................................................................
..............................................................................................................................................................
..............................................................................................................................................................
..............................................................................................................................................................
6. Prior to return to the factory the device has been decontaminated.
☐
yes
☐
no
Description of the decontamination method and the test / verification procedure:
..............................................................................................................................................................
..............................................................................................................................................................
7. The device is free of hazardous, harmful substances.
☐
yes
☐
no
8. Protective measures required for VACUUBRAND employees:
..............................................................................................................................................................
9. If the paint is damaged, we wish a repaint or a replacement of parts for reason of appearance (repaint
and replacement at customer’s expense).
☐
yes
☐
no
10. Legally binding declaration
We assure for the returned device that all substances, which have been in contact with the device are
listed in section 5 and that the information is complete and that we have not withheld any information. We
declare that all measures - where applicable - have been taken listed in section “Return to the factory”.
By our signature below, we acknowledge that we accept liability for any damage caused by providing in-
complete or incorrect information and that we shall indemnify VACUUBRAND from any claims as regards
damages from third parties. We are aware that as expressed in § 823 BGB (Public Law Code of Ger-
many) we are directly liable for injuries or damages suffered by third parties, particularly VACUUBRAND
employees occupied with handling/repairing the product.
Shipping of the device must take place according to regulations.
Name: ....................................................................... Signature: ..............................................................
Job title: .................................................................... Company’s seal:
Date: .......................................................................
Release for repair grant by VACUUBRAND (date / signature):
..............................................................
Devices will not be accepted for any handling before we have received this declaration.
Please read and comply with ”Notes on return to the factory”.
Oil filled pumps: Drain oil prior to shipping absolutely!
VACUUBRAND GMBH + CO KG
Alfred-Zippe-Straße 4
97877 Wertheim, Germany
Tel.: +49 9342 808-5660
Fax: +49 9342 808-5666
E-Mail: [email protected]
www.vacuubrand.com
Summary of Contents for ME 16 NT
Page 42: ...page 42 of 70 3 4 5 4 4x 4 4x 4 2x...
Page 43: ...page 43 of 70 Don t loosen this screw 7 8 6 5 2x...
Page 44: ...page 44 of 70 9 10 11 5 2x...
Page 46: ...page 46 of 70 12 2 5 mm 13 14 2 5 mm 5 8x...
Page 47: ...page 47 of 70 15 696819 696827 16 17 Clean...
Page 48: ...page 48 of 70 696819 696827 18 19...
Page 50: ...page 50 of 70 Assembling the pump head 23 24 25 Pay attention to number of washers...
Page 52: ...page 52 of 70 29 30 31...
Page 54: ...page 54 of 70 35 Maintain all pump heads in the same way ME 16 NT MD 12 NT MV 10 NT 36A 36B...
Page 56: ...page 56 of 70 4 5 6 696827...
Page 57: ...page 57 of 70 7 8 size 2 2x 9 size 2 2x...
Page 59: ...page 59 of 70 Assembling the pump housing 37 38 39 5 2x 8 9 ft lbf 12 Nm...
Page 60: ...page 60 of 70 40 42 41 5 2x 8 9 ft lbf 12 Nm...
Page 61: ...page 61 of 70 45 4 2x 3 7 ft lbf 5 Nm 44 4 4x 3 7 ft lbf 5 Nm 43...
Page 62: ...page 62 of 70 46 4 4x 3 7 ft lbf 5 Nm 47 4 4x 3 7 ft lbf 5 Nm 48...
