VACGEN OMNIAX Series Operating And Maintenance Handbook Download Page 14

 

 

 

   

 
 

 

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•   The condition of the nut must be monitored to ensure 
that  wear  of the main  nut  is  never  such that  the follower 
nut is needed to support the load. 
•   The state of wear of the main nut can be checked by 
monitoring the following three conditions: 
 
 
a. The gap distance, h: If the gap reduces by 0.5mm from 
that  measured  when  first  installed,  the  nut  should  be 
replaced. 
 
b. The torque required to turn the worm gear shaft: If the 
torque required reaches a level of 40Ncm (60 oz.in), the 
nut should be replaced.                        
 
c. The free play of the follower nut on the pin connecting 
it to the main nut: If the follower  nut has no free play on 
the pin, the nut should be replaced.     
 

 
 
 
 

 
 
4.1.6 Lubrication

 

Warning

:  Lubricants  used  in  this  product  may  cause  irritation  to  sensitive  skin.  Wear  protective 

clothing. 
Note that Carbaflo grease discolours with time, particularly where regular bakeouts are applied to the 
equipment. This is normal and does not affect the behavior of the lubricant. 
 

a. Z slide lead screw, linear guide shafts, worm and wheel gears:

 

Clean dirty and excess grease off the components. Lubricate with Carbaflo grease, ensuring that all 
contact  surfaces  are  covered  by  a  film  of  grease.  Should  the  slide  develop  a  dry  squeak,  lubricate 
immediately. 

Warning

: Keep clear of moving parts.

 

b.  Z slide hall bearings (drive screw and worm drive shaft):

  

Use a small quantity of Carbaflo fluid to lubricate each bearing. Apply using a dropper or by dipping a 
clean wire into the container and allowing it to drip onto each bearing. 

c.  Z slide Oldham coupling (motorised Z slide only):

  

Clean dirty and excess grease off the coupling. Lubricate with Carbaflo grease. 

d.  XY Micrometers:

  

Move one micrometer at a time to the limit position so that the spindle is fully retracted. Unscrew and 
remove  the  small  knurled  knob  that  retains  the  micrometer  thimble.  Pull  the  thimble  away  carefully. 
Apply Carbaflo grease to the lead screw. Replace the thimble and knob. 

e. XY stage motor lead screw:

  

Drive the motor to either limit of travel, periodically stopping to lubricate the lead screw as it becomes 
visible on either side of the anti-backlash assembly. 

Warning:

 Keep clear of moving parts.

 

f.  XY Slides:

  

Use a small quantity of Carbaflo fluid to lubricate the slide. Apply using a dropper or by dipping a wire 
into the container and allowing it to drip onto the exposed slide. Note that it is not possible to lubricate 
the full length of the slide, but by cycling the movement a few times, the lubricant will be adequately 
dispersed. 

Summary of Contents for OMNIAX Series

Page 1: ...not represent a commitment on the part of VACGEN No part of this document may be copied or distributed transmitted transcribed stored in a retrieval system or translated into any human or computer la...

Page 2: ...clearance or safety certificate in a form satisfactory to VACGEN has been completed and returned by the customer REPAIR The following additional terms and conditions apply in the event that the custom...

Page 3: ...onstruction Any equipment returned to VACGEN must have the correct Declaration of Contamination securely fastened to the outside of the packaging Warning Harmful gases may be evolved if this equipment...

Page 4: ...onal control X Y Micrometer or stepper motor Z Handwheel or stepper motor Pressure range 1 bar to 10 11 mbar Operating temperature 20o C to 55o C Baking temperature 230o C motors instrument cables and...

Page 5: ...Page 5 of 35 sales vacgen com www vacgen com 44 0 1424 856 333 1 4 BASIC DIMENSIONS Figure 1 Basic dimensions and layout of Omniax...

Page 6: ...If used with the 50mm ID support tube travel must be limited to 15mm vectorial 5 The XY travel is limited by the vectorial sum of the X and Y movement i e X2 Y2 Some examples are shown in the table be...

Page 7: ...sponsibility of the user to consider the safety requirements of hazardous materials used with this equipment and the consequence of any leakage however caused Consider possible reactions with material...

Page 8: ...housing With the shipping pin in position adjust the micrometers to read the central position of the stage The graduated thimble can be rotated to zero the scale Tighten the clamp and remove the ship...

Page 9: ...protect against vectorial limits unless they are set to the 45o vector i e X Y 5 5mm for 612 5mm stages or X Y 17 6mm for 25 0 stages It is important that both microswitches are correctly adjusted so...

Page 10: ...tches as position indicators or datum markers Stepper motors may overrun by several steps when a microswitch is activated particularly if traveling at speed Always check the datum position and reset a...

Page 11: ...t overloading the top flange leaning on the equipment etc Caution Where motors are fitted the motor connector must not be disconnected unless the power to the drive has first been switched off Allow a...

Page 12: ...ould the temperature sensing element be in contact with or attached to any part of the translator or the vacuum system i e it must always sense the air temperature Centralize the XY stage and on horiz...

Page 13: ...or stiffness a Compare the action of the X and Y drives by hand operation at the neutral position see above to establish the neutral position Both movements should feel smooth and have the same degree...

Page 14: ...hat all contact surfaces are covered by a film of grease Should the slide develop a dry squeak lubricate immediately Warning Keep clear of moving parts b Z slide hall bearings drive screw and worm dri...

Page 15: ...tation and remove the OMNIAX from the vacuum chamber c Bolt the Omniax to a suitable stand that allows it to be worked on securely in the vertical position such as the transit stand supplied with the...

Page 16: ...First remove the central assembly b Unscrew and remove the eight M6 bolts that secure the base of the Z slide casting to the top plate of the XY stage and lift this assembly away 4 2 4 Z bellows remo...

Page 17: ...flared tube to the underside of the XY table The XY bellows can now be removed c All bellows are fragile and expensive to replace Please handle with care 4 2 6 Support tube bearing removal a Refer to...

Page 18: ...The SDU SMC and SMC E series of powerful bipolar motor controllers can be used to operate any VACGEN motor or any other 4 phase hybrid stepper motor Z slide nut replacement MXNUTK Service kit for repl...

Page 19: ...ill work satisfactorily over its full life A2 OPTION A STANDARD COMPENSATOR USA Description The HSA compensator comprises a floor mounted sprung lever mechanism a tube clamp attached to the translator...

Page 20: ...Pull one of the end fittings from the push rod tube and cut the tube back by the required amount c Replace the end fitting When ready to install offer the OMNIAX to the chamber and WHILST SUPPORTING...

Page 21: ...the springs First remove the translator from the system ALWAYS wear tough gloves and remove the spring from the axle rather than the outer end These values relate to OMNIAX translators that include XY...

Page 22: ...as the track is raised with the ratio of extra width to extra height of 1 2 c Fit the extension pillar to the top of the Z slide This is secured by a single screw through the main pillar d Remove the...

Page 23: ...at this measurement when the travel is at the other extreme A difference greater than 5mm may indicate that further adjustment is necessary Consult the factory The base of the end compensator and the...

Page 24: ...H of the push rod tube from the measured value L H L 345 The push rod end fittings should be adjusted to their mid position when making this calculation b Pull one of the end fittings from the tube a...

Page 25: ...thout connectors to allow connection to alternative drive and controller systems All motor variants are 4 phase 8 lead hybrid stepper motors that can be wired up in most normal configurations as shown...

Page 26: ...angle being 0 9o 2 Limit the maximum current to the following values determined by the drive used Note that running at maximum current can cause motor to run hot and can give rise to resonance Maximu...

Page 27: ...all connections secure Failure to do so may result in disconnection during use and this can permanently damage the motor drive For the same reason never disconnect a motor from its drive unless the po...

Page 28: ...mental motor encoders B6 MOTOR SPARES Order Code Description ZSMPC3LH Cable Motor to SMC SME E or SDU controller DB08073 Cable Encoder to SMC E controller XSOC24 Connector socket Fitted to motor lad o...

Page 29: ...ENcouples are provided with either heater module These are available as either Type K Chromel Alumel or Type N Nicrosil Nisil Type N is recommended where low magnetic permeability is important Tempera...

Page 30: ...e and handling of liquid gases which is entirely the responsibility of the user The use of liquid nitrogen in confined spaces can be extremely dangerous as nitrogen gas levels can build up rapidly Ens...

Page 31: ...ly isolated from the evaporator is supplied for mounting as near as possible to the sample D3 SETTING UP Position the copper condenser coil and polystyrene dewar as near as possible to the nitrogen en...

Page 32: ...ogen emerge Excessive liquid mixed with the exhaust gas will reduce the cooling efficiency f Once the desired temperature has been reached the gas flow can be reduced further g On the completion of th...

Page 33: ...Y Slides MT00B MT108B MT208B MT211B Motor Kits MMOTZST MT08X MT08Y Stands MHSA MHSB MHSC are suitable for incorporation or assembly into a vacuum system or other machinery These products may only be p...

Page 34: ...pment YES NO Toxic YES NO Corrosive YES NO Explosive YES NO Biological Hazard YES NO Radioactive YES NO Other Harmful Substances Equipment and Components that have been contaminated WILL NOT be accept...

Page 35: ...Page 35 of 35 sales vacgen com www vacgen com 44 0 1424 856 333 REVISION DATE COMMENTS INITIALS A Jan 1994 Original release MJD C Sept 1997 ECN2765 D Aug 2015 VACGEN rebrand AJL...

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