V-TEK Royce DE35-ST, User Manual

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DE35-ST Operating Instructions
D292469I 103
b. While moving the holder back and forth, rotate the frame until the
streets are close to the cross hairs.
c. Close the holder and use the Theta Adjust Knurled Screw to fine adjust
the ring.
Ring Holders
Film Rings are two-piece rings approximately 1/4 in thick and various diameters for
various wafer sizes. The film is placed on the Center Ring, then the Outer Ring is
pressed over the Center Ring slightly tensioning the tape on the ring.
Operation of Expanding Ring Holder
1. Install the desired ring holder.
2. Plug the Wafer Holder Interlock Switch (on right back of Wafer Holder) into the
side of the Y-Stage.
3. Raise and unlatch the red handle and lift the Top Plate.
4. Insert the Film Ring into the fixture such that the alignment of the die is in the
correct X and Y orientation.
5. Lower the Top Plate and press it down until the Clamp Mechanism can be
latched under the Bottom Plate.
6. Push the red handle over until it is horizontal. This will stretch the film by about
0.5 in. across the diameter of the wafer.
Occasionally, due to excessive saw through depth, the film may split during the
expansion process. If this happens, slackening the Knurled Screws holding the
Hinge Bar at the back of the Film Frame Holder can reduce the degree of
expansion. The Clamp Assembly at the front of the wafer holder can also be
slackened off in half revolution increments.
NOTE: The Locking Set Screw bears onto the screw thread of the Clamp
Mechanism via a Nylon Insert to prevent damage to the Clamp Mechanism screw
thread.
7. Ensure the Activating Lever trips the Frame Holder Interlock Switch on the top of
the Film Frame Holder.
8. The wafer will probably not be oriented exactly with the North/South Axis of the
X-Y stage. While this is not an operational problem, it is easier to use if the wafer
streets are aligned with this axis.