FPMAN-1-190214
Page 14
AVAILABLE FLOW SIZES
Each size is offered in several optimized maximum flow rates as shown in the table below.
These configurations provide the highest accuracy and turndown ratios stated in the
specifications. Please refer to the model code in the Ordering Information section to select the
desired flow rate.
Port
size
Max SCFH
Air, N,
O2, CO2,
He,
Methane
Max
SLPM Air,
N, O2,
CO2, He,
Methane
Max SCFH
Argon
Max
SLPM
Argon
1/8”
5
2
3
1.5
30
15
20
10
60
30
45
20
1/4"
120
60
90
45
240
120
180
90
360
180
270
135
3/8"
360
180
270
135
480
240
360
180
600
300
450
225
1/2"
600
300
450
225
720
360
540
270
840
420
630
315
960
480
720
360
1080
540
810
405
1200
600
900
450
1320
660
990
495
1440
720
1080
540
3/4”
1440
720
1080
540
1560
780
1170
585
1680
840
1260
630
1800
900
1350
675
1920
960
1440
720
2040
1020
1530
765
2160
1080
1620
810
2280
1140
1710
855
2400
1200
1800
900
2500
1250
1890
945
2600
1300
1980
990