4. Using the evaporator ------------------------------------------------------ 17
4-1 Opening the bell jar ------------------------------------------------ 17
4-2 Bell jar evacuation -------------------------------------------------- 18
5. Using the coating equipment -------------------------------------------- 18
5-1 Preparation ----------------------------------------------------------- 18
5-2 Coating ---------------------------------------------------------------- 18
6. Handling emergencies ---------------------------------------------------- 19
6-1 Temporary power failure ------------------------------------------ 19
6-2 Prolonged power failure ------------------------------------------- 19
6-3 When power is restored ------------------------------------------- 19
6-4 Water supply temporarily cut off -------------------------------- 19
6-5 Water supply cut off for a prolonged period ------------------ 19
6-6 When the water supply is restored ----------------------------- 19
(5) Maintenance and repairs----------------------------------------------------- 20
1. Dangers and safety guidelines during maintenance and repairs 20
2. Maintenance and repairs by the customer --------------------------- 21
3. Removing, maintaining, and installing equipment ------------------ 21
3-1 Oil-sealed rotary vacuum pump --------------------------------- 21
3-2 Oil diffusion pump -------------------------------------------------- 22
3-3 Oil mist trap ---------------------------------------------------------- 23
3-4 Glass bell jar O-ring ------------------------------------------------ 23
3-5 Glass bell jar --------------------------------------------------------- 23
4. Maintenance and inspection checklist--------------------------------- 24
5. Troubleshooting------------------------------------------------------------- 25
6. Handling the oil-sealed rotary vacuum pump during repairs
(When only 1 is in use) --------------------------------------------------- 26
7. Storing the device ---------------------------------------------------------- 26
8. List of consumable supplies --------------------------------------------- 27
(6) Disposal -------------------------------------------------------------------------- 28
1. Precautions when disposing --------------------------------------------- 28
(7) Optional Parts------------------------------------------------------------------- 29
1. Table of standard optional parts ---------------------------------------- 29