Ulvac UMP-40W, Instruction Manual

Page: 31 / 52

ULVAC CRYOGENICS INCORPORATED 25
SUPPLY DESTN ALARM
Touch SUPPLY DESTN ALARM in ALARM MENU, and LN2 SUPPLY DESTINATION screen is
displayed as in Figure 9-7.
When SENSOR DISCONNECT is red and blinking, supply destination is not connected properly.
When SENSOR ERROR is red and blinking, an error is detected in the level gauge of the transfer
destination.
Figure 9-7 LN2 SUPPLY DESTINATION
MAINTENANCE ALARM
Touch MAINTENANCE ALARM in ALARM MENU to turn to the screen in Figure 9-8.
This alarm is activated when the maintenance interval of corresponding component is reached.
These alarms can be cleared by pressing CONFIRM button. However, if the necessary maintenance
is not performed, the same alarm will be activated in 120 hours.
Refer to the corresponding instruction manual for the maintenance intervals of the devices.
Figure 9-8 MAINTENANCE ALARM