Ulvac UMP-40W, Instruction Manual

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ULVAC CRYOGENICS INCORPORATED 15
Installation
Environmental Requirements
(1) Install the equipment at a level and stable indoor place. Power supply or other utilities
should be located nearby.
(2) Install the equipment at a well-ventilated place where the ambient temperature is 10 – 35
°
C
and humidity is 80% or lower (without condensation except for LN
2
dispense port).
(3) Secure the following space for maintenance.
<NOTE> The area other than the back are required only at the time of maintenance and
check, and do not always need to be cleared.
7
5
0
1095
300 300
6
0
0
5
0
0
UMP-40W Top side
Front
Back
Figure 7-1 Maintenance space for the UMP-40W
(4) Lock the wheels to fix the equipment.