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ULVAC CRYOGENICS INCORPORATED
Cooling water (for UMP-40W)
Flow rate
: 300 – 900L/hour (recommended: 330L/h)
Pressure
: 0.02 – 0.17 MPa (recommended: 0.1MPa)
Temperature
: 10 – 32°C (recommended: 20°C)
Water quality
: Tap water equivalent
* Check the water quality on a regular basis.
The flow rate of cooling water should be within the following allowable range. When the
flow rate or pressure is too low, it may result in abnormal suspension, failure, or damaging
cooling water pipes due to the temperature rise.
CAUTION
Summary of Contents for UMP-40W
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