Ulvac TM-2 Instruction Manual Download Page 1

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SK00-6714-DI-002-04

INSTRUCTION MANUAL

OIL MIST TRAP

(CARTRIDGE FILTER ELEMENTS)

MODEL

TM-2

TM-3

TM-4

TM-4S

ULVAC, Inc.

Components Division

http://www.ulvac.co.jp/

Read this manual before operation and keep it at your
hand for immediate reference

Summary of Contents for TM-2

Page 1: ...4 INSTRUCTION MANUAL OIL MIST TRAP CARTRIDGE FILTER ELEMENTS MODEL TM 2 TM 3 TM 4 TM 4S ULVAC Inc Components Division http www ulvac co jp Read this manual before operation and keep it at your hand fo...

Page 2: ...chanism Option 8 4 Inspection and Maintenance 11 4 1 Periodical Inspection 11 4 2 Replacement of Filter Element 11 4 2 1 Dismounting a Filter Element 11 4 2 2 Mounting of a Filter Element 11 4 2 2 Con...

Page 3: ...stallation PKS 9 Fig 8 Oil return mechanism C installation VD 10 Fig 9 Oil return mechanism C installation VS 10 Fig 10 Exploded view of filter element 12 Fig 11 Continuity check of the filter element...

Page 4: ...the future Performance and safety may not be ensured if equipment connected to this trap does not conform to the same rules or if the trap is altered In such cases we cannot guarantee take responsibi...

Page 5: ...The trap s internal pressure may rise causing the casing or level gauge to rupture oil leakage or motor overload Explosive or flammable gas gas that increases the susceptibility of substances to fire...

Page 6: ...ble 1 Specifications Model TM 2 TM 3 TM 4 TM 4S Adopted filter element TM 2E TM 3E TM 4E TM 4SE Maximum procession flow m3 h 1 L min 96 1600 180 3000 420 7000 420 7000 Connecting parts dia 2 Pump side...

Page 7: ...4 2 3 Dimensional Drawings Fig 1 TM 2 TM 3 TM 4 TM 4S dimensional drawing...

Page 8: ...5 Fig 2 TM 2F TM 3F TM 4F dimensional drawing...

Page 9: ...from the outlet 2 This unit has a pressure releasing device Clogging of a filter element may cause hazardous pressure rise at start up or during evacuation of a vacuum chamber A pressure releasing de...

Page 10: ...3 and 4 has a shade as a standard equipment When ducting detach it and use an internal thread For TM 2F 3F 4F and 4S a JIS ducting flange JIS vacuum flange is useful Note When ducting be careful not...

Page 11: ...case Only when the pump is operated under no load or at stop Oil return mechanism B Oil returns into the pump compression process through the gas ballast port CAUTION Oil return mechanism B shall caus...

Page 12: ...on Fig 4 Oil return mechanism A installation VD VS Fig 5 Oil return mechanism A installation PKS Fig 6 Oil return mechanism B installation VD VS Fig 7 Oil return mechanism B installation PKS Parts lis...

Page 13: ...10 Fig 8 Oil return mechanism C installation VD Fig 9 Oil return mechanism C installation VS Parts list Parts list...

Page 14: ...leasing device if any Also check the operation of the pressure releasing device that the valve is lifted when pushed with a finger If it does not operate properly if not lifted replace the filter hold...

Page 15: ...12 Fig 10 Exploded view of filter element...

Page 16: ...ith the lower lid of the main body to prevent static electricity After replacing the filter element check the continuity between the following parts with a tester 1 Filter holding plate Main body lowe...

Page 17: ...perates it is dangerous to keep the pump running In such cases stop the pump immediately and change the filter element Also while this device is operating oil mist exhausted from the pump will not be...

Page 18: ...e is 10 40 b Evacuation gas is dry air or dry nitrogen 0 40 c Operation is done according to this instruction manual 3 However the fol1o ling is not covered by this warranty a Failure due to force maj...

Page 19: ...ription Material Q ty Remarks 1 Filter element 1 TM 3E 2 O ring G300 NBR 1 JIS B 2401 3 Seal washer M10 1 DT 1 10 Table 5 Major replacement parts list TM 4 No Description Material Q ty Remarks 1 Filte...

Page 20: ...period Table 7 Making format for names and contents of hazardous substances or elements Name of parts Hazardous substances or elements Pb Hg Cd Cr6 PBB PBDE Body Element indicating that content of the...

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