MODEL NO OMT-100A/OMT-200A
OIL MIST TRAP
INSTRUCTION MANUAL
Be sure to read this manual before using this instrument
and keep it in your file for future reference.
The contents of this manual are subject to change without
notice for improvement.
ULVAC KIKO , Inc.
1-10-4, Kitashinyokohama,
Kohoku-ku, Yokohama, 223-0059, Japan
TEL 045-533-0205 FAX 045-533-0204
0. INTRODUCTION
0.1
Before Using This Unit
Upon receipt of this unit, check that the delivered unit is the correct model you ordered and that
there is no damage in transit.
For the names of components of the oil mist trap in this manual, refer to "8. EXPLODED
VIEW".
!
WARNING
Before installation, inspection and maintenance, carefully read this manual and fully
understand the specifications, operating procedure and safety cautions.
!
NOTE
No part of this manual may be reproduced for use by a third party without written
consent by ULVAC KIKO.
0.2
Denotations in This Manual
The following denotations are used throughout this manual to call operator's attention to
safety.
The denotations are classified into the following categories.
!
DANGER
Failure to comply with DANGER involves the possibility of impending loss of life or
serious personal injury.
!
WARNING
Failure to comply with WARNING involves the possibility of loss of life or serious
injury.
!
CAUTION
Failure to comply with CAUTION involves the possibility of medium degree of personal
injury or serious damage to the equipment.
!
NOTE
Failure to comply with NOTE involves the possibility of damage to the equipment or
malfunction of the equipment.
-01-