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Ulvac DPG-30R, Instruction Manual, Page: 3 / 65

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Ulvac DPG-30R Instruction Manual Download Page 3

DC  Power  Supply  [DPG-30R  &  DPG-MC60R,  DPG-MC120R,  DPG-MC240R]

 

Introduction 

 

II 

 

1. Safety precautions 

 

1-1  

Most accidents are attributed to carelessness during operation, inspection, maintenance, or repair. 
Failure to comply with the safety precautions or neglecting to anticipate danger causes accidents to happen 
more easily. 
Accidents can be prevented before they happen by anticipating potentially dangerous situations at an early 
stage. 
 
 
 

1-2  

Accidents involving injuries are caused by erroneous operation or inadequate maintenance and inspection 
work. 
Never try to operate the system before carefully reading and understanding the operation, inspection, and 
maintenance sections. 
 
 
 

1-3  

Warnings and precautions about safety are listed in this manual and on the system's warning labels. 
Use caution as ignoring these warnings and precautions may lead to injury or loss of life. 
 
 
 

1-4  

Supervisors,  operators,  and  maintenance  personnel  should  read  this  manual  before  operation  or 
maintenance. 
Only those who know how to handle the system and have received training should perform the appropriate 
work on the system using the correct techniques and tools. 
 

Summary of Contents for DPG-30R

Page 1: ...u ua al l 30 kW DC Power Supply Controller Model DC power supply DPG 30R Controller DPG MC60R DPG MC120R DPG MC240R 5th Edition July 14 2023 ULVAC Inc Read this manual before using the system Store th...

Page 2: ...r Safe Operation starting from page 1 Carefully read and understand these sections before using the system Carefully store this manual nearby so it can be used at anytime When the system s installatio...

Page 3: ...caused by erroneous operation or inadequate maintenance and inspection work Never try to operate the system before carefully reading and understanding the operation inspection and maintenance sections...

Page 4: ...ot be avoided Work that ignores this warning carries the risk of minor injury to workers damage to the system or the system may require adjustment There is no direct danger but this symbol notes conte...

Page 5: ...Description Warning Be careful of heavy item handling There is a risk of injury Use the required equipment Danger Hazardous voltage There is a risk of serious bodily injury or death due to electric s...

Page 6: ...the customer 6 Warranty disclaimer 1 A system that has exceeded the warranty period 2 Malfunction or failure caused by natural disasters like fire wind and flood damage earthquakes lightning and othe...

Page 7: ...any questions contact to ULVAC When contacting ULVAC please inform us of the names or model numbers of the products the serial numbers and the symptoms of the problem in as much detail as possible 5...

Page 8: ...Polybrominated biphenyls PBB Polybrominated diphenyl ether PBDE Chassis Circuit boards electrical components Cables Indicates that this hazardous substance contained in all of the homogeneous material...

Page 9: ...ontrol terminal controller AD IF connector 9 2 6 2 External control terminal supplementary description 12 2 6 3 Recommended digital I O connection circuits 14 2 6 4 Selecting the arc detection level 1...

Page 10: ...ting 34 4 1 4 Timing chart for power supply system control 34 4 1 5 Controller display 35 4 1 6 Error code warning code display on the controller 41 5 MAINTENANCE 44 5 1 INSPECTING AND MAINTAINING THE...

Page 11: ...sufficient enough to pose a danger to human life The utmost care must be taken when handling the power supply If a person accidentally comes in contact with this voltage it will lead to a serious acc...

Page 12: ...ntact ULVAC or an exclusive dealer A nameplate is affixed to the top panel of the power supply Take special care to ensure the nameplate is always legible 1 3 Contact information To order parts ask qu...

Page 13: ...he plasma This system has an external control terminal AD IF on the controller and it operates by external control via a programmable logic controller PLC 2 2 Features A single controller can control...

Page 14: ...r Control cable sold separately 1 cable for each power supply The DPG 30R input cable output cable and control cable are sold separately Cables are provided by ULVAC Inform us separately of the necess...

Page 15: ...erminal are both located on the back of the power supply DC Power Supply DC Power Supply 3 GND 380 480 VAC DC Power Supply DC PS controller DPG MC120R AD I F Vacuum chamber Cathode 2 GND 100 240 VAC D...

Page 16: ...ply DC Power Supply DC Power Supply DC PS Controller DPG MC240R AD I F Vacuum chamber Cathode 1 GND 100 240 VAC Output Input Output Input Output Input Output Input Input Anode Output Input Output Inpu...

Page 17: ...stops and output is shut off by the low arc energy circuit Output connector connector Control Control method Constant power control P control constant current control I control 5 constant voltage con...

Page 18: ...inlet EN60320 Input capacity MC60R 80VA or less MC120R 240R 140 VA or less Leakage current 1 mA or less Regulation Monitor accuracy The lager one of 1 or less of rated outputs and 2 of set values Res...

Page 19: ...is performing output at the set value 14 DCFAIL Low level output while an error is detected on the DC unit 15 RESERVE Not used 16 HARC DO 0 to 24 V COMD Low level output during hard arc detection on t...

Page 20: ...During I control becomes the corresponding system power for a output setting voltage level 0 to 10 V During V control becomes the corresponding system power for a output setting voltage level 0 to 10...

Page 21: ...rface digital signal common return 20 COML User interface LEVEL signal common return 21 LEVEL AI 0 to 10 V COML DC unit output setting voltage 0 to 10 V 4 22 COMA User interface analog signal common r...

Page 22: ...ore Signals are active at low Digital signal output DO 24 V 5mA to 20mA 1ch Analog signals Analog signal input AI 0 to 10 V Analog signal output AO Voltage 0 to 1500 V 0 to 10 V Current 0 to 60 A 0 to...

Page 23: ...R 240R AD INTERFACE side PLC side DCV 3 DCI 4 AI Analog input LEVEL 21 LEVEL COM L 0 01 F 2 2 k 0 01 F 2 2 k COM L COM L COM L COM L PLC side DPG MC60R 120R 240R AD INTERFACE side COM L ISO AMP COM L...

Page 24: ...connector The arc detection level can be selected by combining the signals Table 2 8 Arc detection level selection input Control mode ARCSET0 Pin 23 ARCSET1 Pin 24 150 V High High 120 V High Low 90 V...

Page 25: ...r as Low Table 2 10 ARCDELAY mode selection input About ARCDELAY mode This product has the Low ARC ENERGY circuit as output part Usually ARC ENERGY is small specification in order to perform separatio...

Page 26: ...number of accessories and inspect the exterior of the unit and accessories Standard accessories Unit 1 Cables are all optional accessories When removing the unit from the shipping container attach th...

Page 27: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 3 Setup 17 3 2 Part names and functions 3 2 1 DC power supply front and rear panels Figure 3 2 DC power supply front panel...

Page 28: ...limit LED orange V IN LIMIT Turns on when the input voltage exceeded the upper limit or the lower limit LED orange L ARC OFF Turns off when by the back LARC switch ON Turns on when by the back LARC s...

Page 29: ...aying the output power output current HARC monitor 5 HARC kW A indicator LEDs LED HARC orange Turns on when a connected power supply has detected Hard ARC When displaying Arc Count the number of times...

Page 30: ...error display Displays the next error During the output setting value entry mode Decreases LEVEL output command value FUNC Decreases the LEVEL output command value setting digit ENT SW Push button Not...

Page 31: ...1 RMT side REMOTE control 2 LCL side LOCAL control 3 ARC LEVEL selection switch Rotary switch ARC LEVEL setting switch 1 60 V 2 90 V 3 120 V 4 150 V Only enabled during LOCAL 4 Power selection switch...

Page 32: ...Connector Not used 11 Nameplate Shows the model and serial number 12 Specification label Indicates the model input specification weight etc 1 13 RS232C Connector Not used 1 Listed on the top panel 2 T...

Page 33: ...HARC DO 0 to 24V COM High speed pulse Low level output between 32us during hard arc detection on the DC unit 4 COM Fast hard arc signal common return 5 FAST MARC DO 0 to 24V COM High speed pulse Low...

Page 34: ...s over 1000 V so it falls under the category of high voltage equipment Therefore a Class A ground previous term Class 1 ground with a ground resistance of 10 or lower is required According to Japanese...

Page 35: ...gure 3 7 and Figure 3 8 for the positions to drill the mounting holes The front panels of the DC power supply and the controller do not have a structure that can support the weight of the units For th...

Page 36: ...olation bushings When mounting the DC power supply and the controller in a rack isolate the controller from the rack by attaching isolation bushings as shown in Figures 3 9 and 3 10 Isolate the power...

Page 37: ...MC60R DPG MC120R DPG MC240R 3 Setup 27 Figure 3 10 Isolation bushing attachment positions controller Select a location as dust and vibration free as possible Avoid installing the units in a location w...

Page 38: ...specifications If operated at a temperature outside specifications the equipment may stop because of an alarm the DC power supply may malfunction or the system s lifespan may be affected Top panel Pow...

Page 39: ...When connecting and disconnecting cables ensure that the breakers for the input lines supplying the DC power supplies and the controller are turned off 3 4 1 Cables to connect to the DPG 30R and DPG M...

Page 40: ...2 DC 1 DC4 DC 3 AD IF Controller DPG MC120R DC output 4 DC output 3 DC output 2 DC output 1 CONTROL CONTROL CONTROL AC in 100 240 V PLC CONTROL AC in 380 480 V Control Control Control Control Load AC...

Page 41: ...ONTROL CONTROL CONTROL AC in 100 240 V PLC CONTROL Control Control Control Control Load DC output 8 DC output 7 DC output 6 DC output 5 CONTROL CONTROL CONTROL Control Control Control Control DC6 DC5...

Page 42: ...ng switch Connection with DC PSUs DC1 to DC4 when 120kW setting DC1 to DC8 when 240kW setting Connection with external PLC Figure 3 14 Power supply and external PLC connections top MC120R bottom MC240...

Page 43: ...the power supplies By connecting the power supplies to an external control device such as a PLC all necessary information can be communicated through the analog and digital interface 4 1 2 Controller...

Page 44: ...to 180A 0 to 165A 0 to 240A 0 to 220A 0 to 300A 0 to 275A 0 to 360A 0 to 330A 0 to 420A 0 to 385A 0 to 480A 0 to 440A P control 0 to 30kW 0 to 60kW 0 to 90kW 0 to 120kW 0 to 150kW 0 to 180kW 0 to 210k...

Page 45: ...80 to 480 VAC energize the controller with 100 to 240 VAC then turn on the power switch When these operations are performed the controller s panel will show a display like those below 1 Each 7 segment...

Page 46: ...SET V 10 The CPLD firmware version turns on for 1 0 second ex Ver 00 01 HARC kW A MARC SET V 11 The current DC equipment type is shown for 1 0 second this display changes with the power selector switc...

Page 47: ...The monitor display after power supply startup is the power monitor display and the voltage monitor display You can change the display by pressing the DISP key The monitor values are listed below Powe...

Page 48: ...the corresponding LED indicators turn on Ex During 120 kW 545 V 220 A output HARC kW A MARC SET V V kW Power monitor Voltage monitor HARC kW A MARC SET V V A Current monitor Voltage monitor Changes w...

Page 49: ...SET V V kW Power monitor Voltage monitor Changes with the control mode currently used PSEL P control HARC kW A MARC SET V SET kW Flashing ISEL I control HARC kW A MARC SET V SET A Flashing VSEL V cont...

Page 50: ...he host PLC only Remote mode If the abnormal state does not continue after the error is reset the display returns to the power current monitor display For warnings the error code display is cleared wh...

Page 51: ...code list The error code warning code and its contents displayed on a controller is as follows Table 4 3 Controller error display No Error name Code Error details Classification 1 Configuration error...

Page 52: ...n operating by two or more sets using controller connected other power supplies perform stop operation of DC output at the time of an output 2 Stop operation of the DC output Outputs a signal DCFAIL E...

Page 53: ...hen the Error remains Ex ERROR occurs occur in the order of E310 E330 E310 is canceled and reset E330 is canceled and reset DC FAIL F ERROR 1 E1 ERROR 2 E2 ERROR 0 E0 F E0 E1 E2 E310 0 0 1 1 E330 0 0...

Page 54: ...ections and the clearance for the power supply intake and exhaust vents When performing maintenance always shut off the primary side breaker of the power supply used before working and shut off your u...

Page 55: ...ed replacement period is not a guarantee of the product s lifespan The rate of consumption of these components may also greatly differ according to the frequency of equipment usage and the environment...

Page 56: ...eplace the relevant power supply or controller 2 Cannot release the interlock 1 The photocoupler between pins 35 37 for the analog digital interface AD IF on the external control device cannot turn on...

Page 57: ...that the AD I F connector is connected 2 Check the control mode See 2 6 5 on page 12 9 FAN ERROR Cooling fan error Replace the power supply 10 LARC OVER CURRENT ERROR Low ARC unit section overcurrent...

Page 58: ...als The following materials on the DPG 30R and DPG MC60R MC120R MC240R are included with this manual as a reference 1 DPG 30R external view 2 DPG MC60R external view 3 DPG MC120R external view 4 DPG M...

Page 59: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 49 Figure 7 1 DPG 30R external view...

Page 60: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 50 Figure 7 2 DPG MC60R external view...

Page 61: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 51 Figure 7 3 DPG MC120R external view...

Page 62: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 52 Figure 7 4 DPG MC240R external view...

Page 63: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 53 Figure 7 5 DPG 30R warning label locations...

Page 64: ...DC Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 54 Figure 7 6 DPG MC60R warning label locations...

Page 65: ...Power Supply DPG 30R DPG MC60R DPG MC120R DPG MC240R 7 Reference Materials 55 Weight warning Weight label Nameplate label 11kg Danger high voltage Figure 7 6 DPG MC120R DPG 240R warning label locatio...

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