Ulvac DPG-30R, Instruction Manual, Page: 1 / 65

DC0043E-05
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30 kW DC Power Supply
Controller
Model
DC power supply DPG-30R
Controller DPG-MC60R
DPG-MC120R
DPG-MC240R
5th Edition: July 14, 2023
ULVAC Inc.
* Read this manual before using the system.
Store this manual carefully so that it can be used at anytime.