Ulvac DIS-251, Instruction Manual

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Structure of vacuum pump
3. Installation
WARNING
Danger of electric shock
Install in an area which is not exposed to moisture such as rain or steam.
If moisture comes into and tact with the electric source connection, it can cause fire or
bodily injury due to short-circuit or electric shock.
Avoid moisture
Danger of explosion, fire or accident
Install in an area free from explosive, flammable or corrosive substances.
If not, it can cause explosion, fire or accident.
Install at a safe site
CAUTION
Danger of overheating
Operate at ambient temperature of 5
℃～
40
℃
.
Operating at a temperature range other than that designated can cause accident, failure
or bodily injury such as burns due to overheating.
Use at designated
temperature
Danger of overheating
Install in a well-ventilated area (refer to below chart).
Poor ventilation can disrupt cooling and cause accident, failure or bodily injury such as
burns since this vacuum pump is an air-cooled type.
Necessary ventilated air volume
DIS-251 DIS-501
Over 4 m
3
/min Over 8 m
3
/min
Pa y atte ntion to
ven tilati on
Fixed Scroll FS(1)
Fixed Scroll FS(2)
Orbiting Scroll OS
Cooling Fan
Cooling Fan