Ulvac DAP-9D-DC24, Instruction Manual

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6. Maintenance, Inspection, and Repair
6.1. Cautions for Maintenance, Inspection, and Repair
See Danger (3), P04
See Warning (5)(17) (18)(19), P04 to P05
See Caution (8)(9), P06
See Note (10), P07
Maintenance and repair by the customer’s repair technician is limited to the following
procedures. Do not undertake other repairs, or make modifications other than the standard
options supplied by the manufacturer.
１）
Diaphragm Replacement
２）
Head Gasket Replacement
３）
Suction/Exhaust Valve Replacement
6.2 Maintenance
The following checks are required at least once every three days during operation.
(1) Check for abnormal noises.
(2) Check for abnormal heating of the pump.
(3) Check that gas is discharged normally.
If a problem is found, take the measures described in 6.5 Troubleshooting List.
6.3 Regular Inspections
Inspect consumables after the first 10000 hours of operation, and replace and clean in
accordance with the Replacement and Cleaning Guide on the following page. Refer to 6.4
Replacing and Cleaning Consumables for procedures.
Request replacement by the manufacturer’s service division if a repair technician is not
available.
!
Danger
! Warning
!
Caution
! Note