Ulvac Band Heater, Instruction Manual, Page: 21 / 22

Band Heater (Silicon Rubber Heater) Instruction Manual
ULVAC CRYOGENICS INCORPORATED R-1
Revision History
Date Revision No. Contents
2013/05/15
2013/09/26
2013/12/02
2018/03/06
2019/02/04 2013.05
2013SR01
2013DR02
2018MH03
2019FY04
First edition.
“Introduction” has been revised.
Contact information of Osaka office has been revised in
“Service Network”.
“Service Network” has been revised.
“Service Network” has been revised.
“5. Connector Specifications”
Figure 3 has been modified.