TSI Instruments 3079A, Operation And Service Manual, Page: 27 / 39

Appendix
Model 3079A 7-1
7 Appendix
Periodic Testing of Particulate Matter Air Filters in Cleanroom
Equipment
In this chapter recommendations are given on how to efficiently combine various TSI instruments to
one test unit. Especially the aerosol generators Model 3079 and Model 3079A, the Model 3332 dilution
system the isokinetic sampling probe SYS 529 and the particle counter have been successfully
combined in the past for testing laminar flow boxes, safety work benches, and smaller cleanrooms. All
recommendations are based on the Standards EN 14644-3 and VDI 2083, sheet 3 for testing
particulate matter air filters.
Particle counter for measuring
the clean air
Aerosol Generator
Particle counter and dilution
system for measuring the test
aerosol
Steps 1-4
Steps 7-8
MODEL 3332
MODEL 3079A
Figure 8 : Applications for TSI Instruments
Using a test aerosol with a defined number of particles is the basis for checking the quality of the filter.
In Germany this test procedure defines a minimum particle concentration of 10
6
#/cf according to VDI
standard 2083. This particle number concentration enables a leak detection on an acoustical basis
because commonly used cleanroom particle counters feature a beep tone when a particle is detected.
Particle concentrations exceeding a critical value will cause a continuous beep signal. This way filters
with separation efficiencies according H13 and H14 can be tested. Leaks can easily be located by
scanning the downstream filter.