3
Vacuum System
Vacuum Manifold
10
TSQ Altis, Quantis, and Fortis Hardware Manual
Thermo Scientific
Vacuum Manifold
shows the vacuum manifold (1–6) with the top cover plates removed next to the
turbomolecular pump (7). The vacuum manifold is a thick-walled, aluminum chamber that
encloses the API source interface, ion optics, mass analyzer, and ion detection system
assemblies. It has multiple removable top cover plates, various electrical feedthroughs, and gas
inlets.
Figure 3.
Placement of the turbomolecular pump next to the vacuum manifold
No.
Description
No.
Description
1.
Collision cell chamber
2.
MP0 ion optics chamber
3.
MP00 ion optics chamber
4.
RF lens and ion transfer tube
chamber
5.
API source interface
6.
Mass analyzer chambers
7.
Turbomolecular pump
4
2
7
6
3
1
5
