2
Functional Description
MS Detector
Thermo Scientific
Surveyor MSQ Plus Hardware Manual
31
Vacuum System
The vacuum system evacuates the region around the ion optics, mass analyzer, and ion
detection system. The principal components of the vacuum system include the following:
•
•
•
•
•
A functional block diagram of the vacuum system is shown in
.
Figure 21.
Functional block diagram of the vacuum system
Atmospheric
pressure
region
M-Path
region
RF/dc
prefilter
region
Analyzer
region
(1 Torr)
(10
-
3
Torr)
(10-6 Torr)
S
plit flow
turbomolecular
pump
Exhaust
Foreline
Forepump
V
ent
valve
Air filter
S
ample tube
Pirani
gauge
LC
(or other
sample input
device)