System Description
Vacuum System
3-12
iCAP Q Operating Manual (P/N 1288090, Revision B)
Thermo Fisher Scientific
Forepump
The first vacuum region, the interface vacuum region between the
sample cone and the skimmer cone, is pumped down by a rotary vane
pump, the so-called forepump. The forepump is directly connected to
the interface.
In addition to pumping down the interface region, the forepump also
provides backing to the turbomolecular pump.
Turbomolecular Pump
The split-flow turbomolecular pump backed by the forepump pumps
the intermediate stage and the high vacuum analyzer stage. The
turbomolecular pump is located inside the instrument.
Pressure Measurement
The pressure in the instrument is controlled by an Active Pirani Gauge
(APG) and an Active Inverted Magnetron Gauge (AIM). The APG
monitors the pressure in the interface region. The AIM monitors the
high vacuum in the analyzer region.
The pressure values are read back to the Dashboard of the Experiment
Editor, see
. The values are also read back in the Vacuum
pane of the Instrument Control window.
Figure 3-12.
Experiment Editor - Dashboard
