SUSS CIC1200, User Manual

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MAINTENANCE AND SERVICE
OP CIC1200 E Rev4.0 06-09 Chapter 5
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5
5.3. Service and Installation
5.3.1. Installation
The CIC has been delivered in a special shipment
box and should be installed only be authorized
SUSS technicians.
It shall only be integrated into the SUSS equipment
or machinery and shall only be used with the speci-
fied lamp houses and lamps (see 2. Technical Spec-
ifications CIC1200).
Under special circumstances, and based on sepa-
rate detailed instructions from SUSS, installation
work may be done by experienced and qualified
user engineers. However, never open, modify or al-
ter the CIC or the host machine it is used with.
It has to be ensured that the CIC itself is positioned
in such a way that sufficient air-cooling is guaran-
teed. The airflow through the CIC must be allowed
from bottom to back.
Warning!
The CIC1200 should only be installed or
replaced by authorized SUSS techni-
cians. Other arrangements need the
consent of SUSS MicroTec.
Warning!
Heavy object! Never move or lift with
one Person only. Get help, use proper
lifting aids and ensure safe standing
postures.
5.3.2. Service and Technical
Assistance
The CIC1200 is not user serviceable and no internal
parts are user repairable.
If difficulties arise with the Constant Intensity Con-
troller that can not be resolved by control settings or
lamp exchanges call for further assistance
at nearest SUSS MicroTec office (see SUSS Micro-
Tec Worldwide at the end of the manual or refer to
www.suss.com).
Be prepared to provide following information (if
available):
• Your company name, address, telephone num-
ber and the name of the responsible individual
whom SUSS may contact if further inquiry about
the technical problem is necessary.
• Model number, serial number and software revi-
sion of the equipment.
• A list of associated equipment and description of
the electrical connections.
• A brief description of the problem.
Warning!
No internal parts are user repairable.
The complete device must be sent to
SUSS for service or repair. Failure to do
so can result in heavy damage to the
equipment, including fire, or result in
electrical shock hazards.
When returning parts for service or repair to SUSS
MicroTec Lithography ask in advance for your Re-
turn Material Authorization (RMA). You will be pro-
vided with a tracking number during the repair cycle.
Whenever possible, use original packaging material
( CIC special shipment box) or at least wrap it care-
fully with suited clean packaging material and an ad-
equate box. Also equip the container with shock
indicators.
After the useful life time of the host machine or CIC,
the CIC may be disposed off as industrial waste and
according local and legal requirements.