MEMS footprints
UM0376
8/17
3.4
LGA16 (A) package
Figure 7.
MEMS footprint (LAG16 (A) package)
Table 4.
Mechanical data
Symbol
Dimension
Unit
Xs
0.64
mm
Ys
0.975
mm
Xm
2
mm
Ym
2
mm
Xd
0.8
mm
Yd
0.8
mm
Height
5.0
mm
Width
5.0
mm
Ym
Xm
ai14150
Yd
Ys
Xs
Width
Height
Xd
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