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Doc. no.XL*****-OMI0009-E

High Vacuum L Type Valve

PRODUCT NAME

XLA Series

MODEL / Series / Product Number

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Summary of Contents for XLA Series

Page 1: ...Doc no XL OMI0009 E High Vacuum L Type Valve PRODUCT NAME XLA Series MODEL Series Product Number...

Page 2: ...4 Precautions on Design Selection Mounting Piping Wiring Maintenance 2 Product Specific Precautions 2 6 Maintenance parts 3 Specifications 8 4 Construction and Outer dimensions 10 5 Period and scope...

Page 3: ...e when configuring the equipment 2 Only personnel with appropriate training should operate machinery and equipment The product specified here may become unsafe if handled incorrectly The assembly oper...

Page 4: ...a replacement product or necessary parts will be provided This limited warranty applies only to our product independently and not to any other damage incurred due to the failure of the product 3 Prior...

Page 5: ...product without an auto switch es excluding those with built in magnet it is not possible to mount an auto switch es following receipt of the product from an SMC factory Mounting All models 1 In high...

Page 6: ...roduct deposit may cause the valve to become unsafe the valve should be disassembled cleaned and re assembled by an operator who has sufficient knowledge and experience e g a specialist 1 When removin...

Page 7: ...add M9 at the suffix of the part number Note2 An auto switch for high temperature is available with a different part number Note3 List the optional seal material symbol after the model number except...

Page 8: ...1 XQ1 XR1 XR2 XR3 XS1 XT1 XU1 Note1 Due to the different materials used changing only the seal may prove inadequate Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co Ltd Kalrez R is a r...

Page 9: ...o 1 x 10 6 Conductance l s Note 1 5 14 45 80 160 200 300 800 Leakage Pa m 3 s Internal 1 3 x 10 10 for the standard material FKM at ambient temperatures excluding gas permeation External 1 3 x 10 11 f...

Page 10: ...nominal values Note 2 Heaters are not available for the size 16 models The heaters are PTC thermistor type design These thermistors self regulate their temperature by switching the resistance at cert...

Page 11: ...l maintenance part Body material A6063 Heater option Indicator option A A H G B C C E E D Heater option Auto switch option Fd K flange Fn KF flange Model A B C D E Fn Fd G H XLA 16 40 103 38 1 30 17 4...

Page 12: ...to any damage incurred due to the failure of the valve Result of endurance test with the circuit shown on the right The valve was opened and closed in an internal vacuum state at an ordinary room temp...

Page 13: ...reafter Do not apply excessive force or impact This may damage the product as well as decrease its performance and life expectancy The cylinder portion of this product cannot be disassembled When the...

Page 14: ...nnet assembly Remove the O ring from the groove for discharging gas using a plastic tool to prevent scratch the O ring groove Take care not to scratch the O ring groove Step 3 Remove the outer seal O...

Page 15: ...y dust on the valve seal O ring surface Place the O ring on the O ring groove Press the O ring into the groove in numerical order press diagonally to fit the O ring into the groove Take care not to tw...

Page 16: ...il the O ring is compressed then perform extra tightening in diagonal order For models with heater tighten bolt a to mount the heater to the body Insert the cover Tightening torque of bolt b N m Valve...

Page 17: ...hiyoda ku Tokyo 101 0021 JAPAN Tel 81 3 5207 8249 Fax 81 3 5298 5362 URL http www smcworld com Note Specifications are subject to change without prior notice and any obligation on the part of the manu...

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