3. Specifications
3-1. Vale specifications
Note1) Conductance is “molecular flow” measured with an elbow pipe which has the same dimension as
each applicable flange.
Note2) For one cycle of cylinder.
Model
XLA-16
XLA-25
XLA-40
XLA-50
XLA-63
XLA-80
XLA-100
XLA-160
Flange (valve) size
16
25
40
50
63
80
100
160
Actuating type
Normally closed
Fluid
Vacuum of inert gas
Operating temperature
o
C
5 to 60 (5 to 150 for high temperature type)
Operating pressure Pa(abs)
Atmospheric pressure to 1 x 10
-6
Conductance l/s
Note 1
5
14
45
80
160
200
300
800
Leakage
Pa
・
m
3
/s
Internal
1.3 x 10
-10
for the standard material (FKM)
at ambient temperatures , excluding gas permeation
External
1.3 x 10
-11
for the standard material (FKM)
at ambient temperatures , excluding gas permeation
Flange type
KF (NW)
KF (NW) , K (DN)
Main material
Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard
sealing material)
Surface treatment for body
Outside: hard anodized Inside: basis material
Actuation pressure MPa(G)
0.4 to 0.7
Air consumption
cm
3
Note 2
for
0.5MPa
19
46
200
360
660
1350
3000
5150
Port size
M5
Rc 1/8
Rc 1/4
Weight
kg
0.25
0.45
1.1
1.6
2.9
5.0
10.6
18.5
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XL*****-OMI0009-E