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www.Siargo.com                                                 

FS800o User Manual

 

 
 

MEMS Mass Flow Sensors 

with thermal calorimetric sensing technology 

FS8000 Series  
 
 

User Manual  

Document No. 

07-2021-FS10 EN 

Issue date:    

2021.07  

Revision:  

 

VC.0.1 

 
 
 
  
 

Siargo Ltd.  

3100 De La Cruz Boulevard, Suite 210  
Santa Clara, California 95054 
USA 
 
Tel: +1(408)969.0368  
Email: [email protected] 
 
 
 
 
© 

Copyright 2021 and Liability Disclaimer   

Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions 
without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this 
manual. For further information and updates, please visit www.Siargo.com. 
 
 

Summary of Contents for FS8000

Page 1: ...FS8000 User Manual MEMS mass flow sensors 2021 Siargo Ltd VC 0 1 Sold in North America by Servoflo Corporation 75 Allen Street Lexington MA 02472 www servoflo com info servoflo com 781 862 9572...

Page 2: ...La Cruz Boulevard Suite 210 Santa Clara California 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2021 and Liability Disclaimer Siargo Ltd and its subsidiaries reserve the right to chan...

Page 3: ...s product according to the specified parameters Only the trained or qualified personnel shall be allowed to perform product services Be cautious for electrical safety and even it operates at a low vol...

Page 4: ...ad write sequences 12 6 Product selection and order information 13 6 1 Product selection 13 6 2 Order contact and customer support 13 7 Product performance 14 7 1 Technical specifications 14 7 2 Analo...

Page 5: ...hich is particularly applicable for semiconductor equipment such as die attachment and wire binder The product performance maintenance and troubleshooting as well as the information for product order...

Page 6: ...l find the product either FS8001 or FS8003 per the actual order together with the power and data cable if the order is included as shown below Please check immediately for the integrity of the product...

Page 7: ...ption Figure 3 1 FS8001 FS8001N description Figure 3 2 FS8003P description Direction for flow measurement Threaded outlet inlet at the opposite Installation hole Power and data connector Power and dat...

Page 8: ...01 non linear model FS8001N pin assignment Table 3 3 FS8003P pin assignment Note The connector on the sensor is an SM05B SRSS TB manufactured by JST the cable match is SHR 05V S no protrusions also ma...

Page 9: ...9 www Siargo com FS800o User Manual 3 3 Mechanical dimensions Figure 3 3 FS8001 FS8001N mechanical dimensions Figure 3 4 FS8003P mechanical dimensions...

Page 10: ...ded torque for the M3 screw is 0 25 0 03 N m The sensor comes with a standard data and power cable of 0 5m users can extend the cable with a shielded counterpart Make sure to the mechanical leakage pr...

Page 11: ...7 are available oBH 1 Filter depth Write Int 8 0 254 1CH 1 Flowrate offset reset Write 1 byte ensure no flow conditions 82H 12 Serial number Read ASCII 83H 4 Flow rate Read Int32 1000 SLPM CRC CRC Byt...

Page 12: ...12 www Siargo com FS800o User Manual 5 3 I2 C interface read write sequences...

Page 13: ...offices and the sales distributors representatives are listed at the end of this document For small quantities the order can be placed either through the Siargo website www siargo com or the sales off...

Page 14: ...001N 1 0 msec Working temperature 0 55 C Temperature coefficient 0 12 C Working pressure 0 5 MPa Humidity 95 no condensation RH Power supply 8 24 Vdc Working current 20 mA Output FS8001 FS8003P Linear...

Page 15: ...tput Figure 7 1 The typical analog output of the linearized models FS8001 and FS8003P Figure 7 2 The typical analog output of the non linearized model FS8001N Mass flow sccm Typical analog output mV 0...

Page 16: ...ance against the environmental parameter alternations Please refer to the company s US patents and other publications made available to the public for additional information 8 2 Precautions for the be...

Page 17: ...ommended by OIML R137 a stable flow system must be ensured This is because the current product is designed for a small pressure loss therefore the sensor does not have a strong flow restrictor or cond...

Page 18: ...ation etc other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses in...

Page 19: ...smantled for whatever reasons 4 Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufacturer...

Page 20: ...Clara California 95054 USA Phone 01 408 969 0368 Email info Siargo com For orders please provide an accurate and full postal address Siargo will not ship to P O Boxes or via a third party Please cont...

Page 21: ...he I2C interface in serial For further information and purchase of the evaluation kit please contact the manufacturer or the sales representative Each converter has a fixed cable that can be directly...

Page 22: ...ndalone manual FS8001 Revision B 0 November 2018 o Formulated standalone manual FS8000 Revision A 11 August 2018 o I2C protocol descriptions lifetime update FS8000 Revision A 10 March 2018 o Add maxim...

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