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FS34100 User Manual        

                                                    

1 

|

 

P a g e

 

 
Gas Mass Flow Meter 

with MEMS thermal time-of-flight sensing technology 

FS34100 Series  

 

 

User Manual  

Document No. 

07-2022-OEMFSN1 EN 

Issue date:    

2022.07 

Revision:  

 

VA.0.01 

 

 

 

  

 

Siargo Ltd.  

3100 De La Cruz Boulevard, Suite 210  

Santa Clara, CA 95054 

USA 

 

Tel: +1(408)969.0368  

Email: [email protected] 

 

 

 

 

© 

Copyright 2022 by Siargo Ltd.  

Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions 

without prior notice. For further information and updates, please visit: 

www.Siargo.com

 

 

 

 

 

Summary of Contents for FS34100

Page 1: ...FS34100 User Manual MEMS mass flow sensors 2022 Siargo Ltd VA 0 01...

Page 2: ...SN1 EN Issue date 2022 07 Revision VA 0 01 Siargo Ltd 3100 De La Cruz Boulevard Suite 210 Santa Clara CA 95054 USA Tel 1 408 969 0368 Email info siargo com Copyright 2022 by Siargo Ltd Siargo Ltd and...

Page 3: ...bration environment x Use this product according to the specified parameters x Only the trained or qualified personnel shall be allowed to perform product services x Be cautious for the electrical saf...

Page 4: ...nection 11 5 4 RS485 Modbus communication protocol 12 5 5 1 Hardware connection 12 5 5 2 Communication parameters 12 5 5 3 Frame 13 5 5 4 Function codes 13 5 5 5 Registers 13 5 5 Analog output 0 5 4 5...

Page 5: ...rgo com FS34100 User Manual 4 P a g e 9 Troubleshooting 22 10 Warranty and Liability 23 11 Service order contact and other information 25 Appendix I Product evaluation kit 26 Appendix II Document hist...

Page 6: ...ar or 73 PSI and a compensated temperature ranging from 10 to 55 C The products are designed with an easy change of mechanical connectors The standard connectors are BSPT 1 4 or one touch connectors a...

Page 7: ...packing box and you shall find the product The power and data cable as shown below may also be found according to the same packing materials Figure 2 1 FS34100 flow meter Figure 2 2 data cable Please...

Page 8: ...sitions compatible connector with a length of 0 5 meters 2 The RS485 Modbus is asynchronous half duplex communication When the data are transmitted or received from the product the other pin is servin...

Page 9: ...ensions Figure 3 3 FS34100 dimensions with BSPT R1 4 connectors Figure 3 4 FS34100 dimensions with one touch connectors Note Other threads or compressive types can be customized The mounting screw len...

Page 10: ...spected to ensure no visual damage b Before installation of the product please ensure that the pipe debris or particles or any other foreign materials are completed removed c Close the upstream valve...

Page 11: ...will conclude the installation Cautions a Don t alter any parts of the product b Ensure the electrical connection is properly done per the instructions c Make sure no mechanical stresses in the conne...

Page 12: ...ns For the best performance of the product it is advised that the gas to be measured must be clean and free of particles or other foreign materials 5 2 Check the leakage Check gas leakage before any m...

Page 13: ...cable connection 5 4 1 Hardware connection The RS485 hardware layer is TIA EIA 485 A as illustrated below In this configuration the product FS34100 is a slave Figure 5 1 RS485 hardware 5 4 2 Communic...

Page 14: ...ion codes applied for the product are the sub class of the standard Modbus function codes These codes are used to set or read the registers of the product Table 5 3 function codes Code Name Functions...

Page 15: ...below Y enabled N disabled Address 0x0001 Write Y Read Y Description Address of the product Value type UINT 16 Notes Values from 1 to 247 except for 157 0x9d Broadcast is not enabled and the default...

Page 16: ...ription Meter response or data sampling time Value type UINT 16 Notes The default value is 10 10 msec Options are 10 20 50 100 and 200 msec It is recommended that write protection should be applied af...

Page 17: ...is disabled After the write execution is completed the firmware will automatically re enable the write protection s 5 5 Analog output 0 5 4 5Vdc The product offers a voltage analog output of the insta...

Page 18: ...e pressure losses of the selected models Table 5 6 FS34108 pressure loss Flow rate sccm Pressure loss Pa PSI 0 0 0 o 5 0 8 0 001 10 0 25 0 004 20 0 90 0 013 30 0 200 0 029 40 0 370 0 054 50 0 580 0 08...

Page 19: ...meters Refer to the following for details FS341 Gas A air Ar N2 O2 C CO2 for other gases please contact the manufacturer Output B RS485 V 0 5 4 5 Vdc Maximum full scale flow rate for the value refer t...

Page 20: ...e 0 5 MPa Response time 10 default 50 1000 programmable msec Filter depth 0 default 4 255 programmable msec Humidity 95 no condensation RH Power supply 8 24 50 mA Vdc Analog output 0 5 4 5 Vdc Maximum...

Page 21: ...independent mass flow measurements for gases with similar thermal diffusivities It significantly simplifies the process control with high precision and easy maintenance and is very cost effective Plea...

Page 22: ...ow path which could bring irrecoverable damage 8 2 3 Apply to a different gas medium The product is calibrated with a high precision NIST traceable metrological standard with clean and dry air Thanks...

Page 23: ...gging Check flow and contamination Power regulator failure Return to factory Sensor failure Return to factory Large errors or unexpected flow rate Particles fluid type Check system Erroneous or large...

Page 24: ...allation etc other consequential or indirect damages of any kind To the extent permitted by law the exclusive remedy of the user or purchaser and the limit of Siargo s liability for any and all losses...

Page 25: ...r dismantled for whatever reasons 4 Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufactu...

Page 26: ...n case you need any further assistance please contact info siargo com to obtain additional information or a Return Materials Authorization RMA before shipping the product back to the factory for facto...

Page 27: ...for further analysis It can read from up to 128 sensors with the RS485 interface in serial For further information and purchase of the evaluation kit please contact the manufacturer or the sales repre...

Page 28: ...www Siargo com FS34100 User Manual 27 P a g e Appendix II Document history Revision A 0 01 July 2022 Update service and sales contact Revision A 0 August 2021 First release...

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