Shimadzu iMLayer Installation Requirements Download Page 5

 

ZEBV-5088C 

2. Installation Conditions 

 

Be sure to read the installation precautions described below to keep the instrument stable. Also, follow the 
precautions given in the Safety Precautions of the instruction manual that came with the instrument. 

 

2.1 Carrying-in 

 

The instrument can be carried on a hand truck. Check the following points so that delivery can be carried 
out without problems. 
1) Check that there is no step the passage. 
2) When lifting the iMLayer, be sure to wear non-slip gloves and to work by more than two persons. 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

Summary of Contents for iMLayer

Page 1: ...ZEBV 5088C Matrix Vapor Deposition System iMLayer Pre Installation Requirements Installation Preparations Confirmation...

Page 2: ...on Copyright 2018 Shimadzu Corporation 2 Information in this manual is subject to change without notice and does not represent a commitment on the part of the vendor 3 Any errors or omissions which ma...

Page 3: ...2 Contents 1 INTRODUCTION 3 2 INSTALLATION CONDITIONS 4 2 1 Carry in route 4 2 2 Example installation 5 2 3 Wiring and Piping 7 2 4 Ambient Requirements 7 2 5 Required Power Supply 8 3 Customer pre ch...

Page 4: ...ent stable please make prior arrangement in accordance with these requirements They can also be used for routine maintenance This instrument consists of a main unit used for vapor deposition of the ma...

Page 5: ...in the Safety Precautions of the instruction manual that came with the instrument 2 1 Carrying in The instrument can be carried on a hand truck Check the following points so that delivery can be carr...

Page 6: ...on dimensions indicated in mm Front view Top view Fig 1 Typical Layout Using a Typical Draft chamber 650 610 230 510 980 1 2 4 3 5 416 150 430 1000 150 296 150 450 305 390 660 382 100 650 opening Wall...

Page 7: ...chamber 660mm or more Inside width of the draft chamber 1000mm ore more Height of opening front glass 650mm ore more Load limit Inside floor 100kg ore more Minimum local exhaust air velocity 1m s ore...

Page 8: ...ACcable 2 5 8 RP power supply cable 2 0 9 RPevacuation hose 3 10 RPsuction hose 3 2 4 Ambient Requirements To ensure safe use of the product sufficient consideration must be given to preparing its in...

Page 9: ...sharing power source with other equipment To avoid electric shock ensure grounding at power supply ground terminal has a resistance of 100 ohm or less To assure performance keep voltage fluctuation wi...

Page 10: ...Terminal Inside To iMScope AC100V in To power supply Earth Terminal Outside 225 25316 STEP DOWN TRNASFORMER 1 5K 225 25317 41 CABLE ASSY IMSCOPE PS1 225 25319 41 CABLE ASSY IMSCOPE PS3 225 25318 41 CA...

Page 11: ...the following pages are a checklist for each of the installation conditions that have been described in this document Please fill out the checklist yourself and pass it on to the appropriate personne...

Page 12: ...the following specifications Inside depth of the draft chamber 660mm or more Inside width of the draft chamber 1000mm ore more Height of opening front glass 650mm ore more Load limit Inside floor 100k...

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