7 of 30
flow rate can represent mass flow rate.
The standard mounting position is horizontal, And other positions such as
vertical(inlet up or down)
，
flatwise or customized position are optional. The mounting
position should be specified by the customer to ensure the best accuracy.
1.6.2 Manufacturing Environment
The MFC are assembled in a class 100 clean room, calibrated, packaged and
controlled in class 1000 environment. The temperature is 22±2
℃.
1.6.3 Precision Adjustment
Each MFC is accurately controlled for 24 hours after manufacturing on a different
calibration bench. The accuracy, the dynamic response, the stability to pressure
variations is double checked, only qualified product available for sale.
SECTION 2 INSTALLATION
2.1 General
WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.
After installing the MFC, the system should be thoroughly checked to ensure it is leak-free.
Purge the MFC with a dry inert gas for one hour before using corrosive gases.
IMPORTANT: When installing the MFC, ensure that the arrow on the back of the unit
in the same direction as the gas flow.
2.2 Unpacking
