2
Contents
1.
Outline of the Product ................................................................................................................................. 3
Preface ............................................................................................................................................................ 3
Purpose of use ................................................................................................................................................ 3
Definition of DANGER, WARNING, CAUTION and NOTE ............................................................................ 3
2.
Important Notices on Safety ........................................................................................................................ 4
2-1. Danger cases........................................................................................................................................... 4
2-2. Warning cases ......................................................................................................................................... 5
2-3. Precautions .............................................................................................................................................. 6
3.
Product Components .................................................................................................................................. 7
3-1. Main unit and standard accessories ........................................................................................................ 7
3-2. Names and functions for each part ......................................................................................................... 9
3-3. Tubing diagram ...................................................................................................................................... 13
4.
How to Use ................................................................................................................................................ 14
4-1. Before using the purity meter ................................................................................................................ 14
4-2. Preparation for start-up ......................................................................................................................... 14
4-3. How to start the purity meter ................................................................................................................. 16
4-4. Basic operating procedures ................................................................................................................... 17
4-5. Self-diagnosis function at start-up ......................................................................................................... 18
4-6. Reference calibration............................................................................................................................. 19
4-7. Supplying measuring gas ...................................................................................................................... 20
4-8. Performing measurement ...................................................................................................................... 21
4-9. Manual memory ..................................................................................................................................... 22
4-10. Measuring gas/range detail display ..................................................................................................... 23
4-11. Checking zero point ............................................................................................................................. 24
4-12. Power-off ............................................................................................................................................. 25
5.
How to Set Setup Mode ............................................................................................................................ 26
5-1. Entering the setup mode ....................................................................................................................... 26
5-2. Measuring gas setting "1. SELECT GAS" ............................................................................................. 28
5-3. Date/time setting "2. SET DATE/TIME" ................................................................................................. 29
5-4. Saved data display "3. VIEW SAVED DATA" ........................................................................................ 30
5-5. Saved data clear "4. CLEAR SAVED DATA"......................................................................................... 31
5-6. Switch to measuring mode "6. START MEAS." .................................................................................... 32
6.
Operations and Functions ......................................................................................................................... 33
6-1. CAUTION display .................................................................................................................................. 33
6-2. ERROR display ..................................................................................................................................... 34
7.
Maintenance .............................................................................................................................................. 35
7-1. Maintenance intervals and items ........................................................................................................... 35
7-2. Calibration .............................................................................................................................................. 37
7-3. How to clean .......................................................................................................................................... 38
7-4. Parts replacement ................................................................................................................................. 39
8.
Storage and Disposal ................................................................................................................................ 40
8-1. Procedures to store the purity meter or leave it for a long time ............................................................ 40
8-2. Procedures to use the purity meter again ............................................................................................. 40
8-3. Disposal of products .............................................................................................................................. 40
9.
Troubleshooting ......................................................................................................................................... 42
9-1. Troubles on the unit ............................................................................................................................... 42
9-2. Troubles in reading ................................................................................................................................ 44
10.
Product Specifications .......................................................................................................................... 45
10-1. List of product specifications ............................................................................................................... 45
10-2. List of options ...................................................................................................................................... 45
11.
Appendix ............................................................................................................................................... 46
12.
Detection Principle ................................................................................................................................ 47
