Renishaw RGH20, Installation Manual, Page: 17 / 19

Speed
Digital systems, maximum speed (m/s)
Resolution (µm)
5
5.000
5.000
5.000
5.000
5.000
5.000
5.000
5.000
5.000
5.000
4.219
4
Minim
um receiver c
loc
k frequenc
y (MHz)
Internal c
loc
k frequenc
y (MHz)
Interpolation factor (period to resolution)
50
40
25
20
12
10
8
6
5
3
1
36
30
18
15
10
9
7.2
5
4.5
2.5
0.9
1
5.000
5.000
5.000
5.000
5.000
5.000
5.000
4.500
4.050
2.250
0.844
20
0.5
5.000
5.000
5.000
5.000
4.500
4.050
3.240
2.250
2.025
1.125
0.422
40
0.2
5.000
5.000
3.240
2.700
1.800
1.620
1.296
0.900
0.810
0.450
0.169
100
0.1
3.24
2.700
1.620
1.350
0.900
0.810
0.648
0.450
0.405
0.225
0.084
200
50 nm
1.620
1.350
0.810
0.675
0.450
0.405
0.324
0.225
0.203
0.113
0.042
400
20 nm
0.648
0.540
0.324
0.270
0.180
0.162
0.130
0.090
0.081
0.045
0.017
1000
10 nm
0.324
0.270
0.162
0.135
0.090
0.081
0.065
0.045
0.041
0.023
0.008
2000
5 nm
0.162
0.135
0.081
0.068
0.045
0.041
0.032
0.023
0.020
0.011
0.004
4000
REF0000
analogue output system
10
Signal amplititude (%)
10 100
100
Frequency (kHz)
Speed (m/s)
1
2 4
8
–
AGC Off
–
AGC On
SECTION
2 - RGH20F/REF systems
(continued)