
Page 9 of 87
Specifications
Resistance Range:
1
x103 to > 1x1014
Ω
(dependent on test voltage)
1x106 - >1x1014
Ω
at 1000VDC
1x105 - 1x1013
Ω
at 100VDC
1x104 - 1x1012
Ω
at 10VDC
1x103 - 1x1011
Ω
at 1VDC
(7 ranges or auto ranging)
Resistance Accuracy:
*
±
[0.45% +{(Rx/Vx)(0.0005 FS + 2pA) + 30
Ω
/Rx}100%]
Rx: Measured resistance in ohms
Vx: Programmed voltage in volts
FS: Full scale current range in amperes
Voltage Range:
1 to 1000, Volts programmable in two ranges
Voltage Accuracy:*
1 - 100V: 1% of s1V
25mV
resolution
100 - 1000V: 1% of s2V
250mV
resolution
Output Voltage
Impedance:
1
k
Ω
±
5%
Current Limited:
<
2mA
Current Measure:
1x10-13 to 1x10-3 amps
Current Accuracy:*
1nA to 1mA:
±
[0.5% + (0. 2pA)]
100pA to 1nA:
±
[1% + (0. 2pA)]
1pA to 100pA:
±
[10% + (0. 2pA)]
Input Impedance:
5 k
Ω
±
5%
Measure Limits:
Pass/Fail (1 limit)
Display:
LCD graphic display
Voltage warning indicator
Pass/Fail
indicator
*
specified at front panel connectors
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