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41

ION BEAM RF SOURCES MANUAL 

Chapter 5: Advanced Operation

Impingement damage can occur when ions strike a 
grid directly.  The most common mechanism for this 
is when the accelerator grid holes become unevenly 
coated near the edge of the grid.  The beamlets 
will then steer and strike the decelerator grid.  
Impingement will also occur when grids are distorted, 

misaligned, or have uneven spacing.  A coating flake 

can also create a temporary impingement situation.  
The damage to the grid will be holes that are shaped 
like teardrops or ovals.  It is normal to have some 
of these holes, especially near the edge of the grid.  
Grids are usually replaced when this type of wear 
becomes excessive.

Delamination can occur when the molybdenum is 
nearing its end-of-life.  Layers of material begin to 
separate between grid holes.  The layers will distort 
and can peal back.  Delamination will occur when 
grids have been cleaned numerous times.  It can 
also be triggered when grids have been cleaned too 
aggressively (i.e. media blast at too high of pressure). 
The delaminated sections of the grid can trap water 
vapor and will promote grid arcing.  When this 

condition is first noticed, consider it an alert the grids 

will need to be replaced soon.

Impingement wear due to coating of the accelerator 
grid.

Delamination is where the molybdenum starts to 
peal back, bubble, and separate between holes.

Summary of Contents for 701-6-1-2

Page 1: ...1 ION BEAM RF SOURCES MANUAL ESTABLISHED 2003 ...

Page 2: ... to your facility to ensure maximum safety and prohibit usage of the equipment when unsafe conditions arise Failure to use the external interlock is considered High Risk Activities where personal injury or equipment damage may result Plasma Process Group specifically disclaims any expressed or implied warranty for High Risk Activities The ion beam power supply has been CE certified and the electro...

Page 3: ...ber Our support team will provide a return request form with instructions to start the process This form is also located at our website plasmaprocessgroup com see Resources then Terms and Forms Special instructions will apply to international customers Our workmanship warranty can be found at our website plasmaprocessgroup com see Resources then Terms and Forms Service and Technical Support Produc...

Page 4: ... is used for tips and other pointers Warning Statements Warning Risk of Injury to Persons This symbol is used to warn of a heavy lift operation CAUTION This symbol is used to alert of a potential risk to person or equip ment WARNING This symbol illustrates a electrical shock hazard ...

Page 5: ...38 Section 5 4 Technical Tips 39 Chapter 6 Maintenance 42 Section 6 1 Maintenance Work Station 42 Section 6 2 Schedule 43 Section 6 3 Common Wear and Tear 44 Section 6 4 Recommended Spare Parts 45 Chapter 7 Troubleshooting 46 Section 7 1 Common Issues and Quick Fixes 47 Section 7 2 Power Supply Error Codes 48 Section 7 3 RF Neutralizer RFN Errors 51 Section 7 4 Starting the Source 53 Section 7 5 T...

Page 6: ...igh velocities so they are ejected downstream from the source The ejected ions are directed to form a beam in which they all have the same energy and can be directed to a target or other substrate At low energies the ion beam is useful for etching or cleaning parts At high energies the ion beam can be used to sputter target materials An RF ion source package consists of the ion beam source an RF n...

Page 7: ...ts for operation These include the gas inlet also called gas isolator the RF antenna also called coil discharge chamber and grids Process gas such as high purity Argon is fed into the discharge chamber The RF antenna will then excite free electrons causing ionization of the process gas A plasma is then created inside the discharge chamber A plasma is an electrically conductive gas where the densit...

Page 8: ...or grid charge exchange mA A B Ratio Ratio of accel to beam current Typical A B is 10 Section 1 2 Overview The schematic below illustrates how the key elements work inside the source Process gas is supplied to the discharge chamber The RF antenna is tuned using the matching network where its voltages can reach upwards of 2500 V The oscillating field will excite free electrons that can ionize the p...

Page 9: ...tching network Please refer to its manual for a detailed description of its operation and additional information The RFN needs to be placed so that its electrons can couple or see the ion beam It is very important that these electrons have a close about 150 mm unobstructed path to the beam to ensure stable noise free operation The RFN should also be located away from strong magnets or shielded fro...

Page 10: ... this manual Chapter 5 also has tech tips for the source RFN and I BEAM The table below are the critical operating parameters for the RFN The I BEAM ion source controller NEUTRALIZER PARAMETERS PARAMETER DEFINITION UNIT RFN Gas Flow Gas delivered to the neutralizer sccm RFN Forward Power The RF power applied to the matching network W RFN Reflected Power The RF power reflected from the matching net...

Page 11: ... minimal pressure fluctuations The facilities should run electropolished stainless steel gas lines between the bottle and MFC and between the MFC and source or RFN Cooling The RF sources will require water cooling for the RF antenna This promotes RF power stability Some of the RF sources also have a water cooled shroud Treated drinking water at 25 C and no more that 300 kPa 50 psi is recommended C...

Page 12: ...eam and the source grid design will control the degree of focus Beam over spray should also be considered when designing a system In the Learning Center of our website we have beam coverage diagrams These illustrate how the beam shape is changing downstream with different sources and grid assemblies Ion Current Density For some applications it can be useful to determine the expected ion current de...

Page 13: ... beam source and sub assemblies have been rigorously cleaned Common vacuum practice is recommended while handling the source components This requires that the operator use latex or non latex type gloves to prevent finger oil from contaminating the surfaces of the ion source Some of the items will be wrapped in vacuum grade aluminum foil for shipment protection Remove all foil and other plastic bag...

Page 14: ... open port on the vacuum system For o ring type apply a thin coating of vacuum grease to the supplied o ring and install the o ring on the chamber orifice For metal seal type clean and install the metal gasket Flange mount Step 3A Use appropriate lift assistance to pilot the source assembly into position on the chamber The assembly is quite heavy Make sure the o ring or gasket retains its position...

Page 15: ... source body Attach discharge chamber Internal and Flange mount Step 4 Prepare the grid assembly for installation by first removing the clamp ring Install the quartz discharge chamber onto the grid assembly The dis charge chamber should have some movement free dom when installed properly Be careful the quartz discharge chamber is fragile Step 5 Mount the grid assembly to the source by lining up th...

Page 16: ...all the RFN and its matching network to the desired vacuum port Connect its gas line from the mass flow controller Step 10 Connect the RF cables from the source and RFN to their appropriate connectors on the power supply The red colored RF cable is for the source connection the blue colored cable is for the RFN connection NOTE Incorrect connections can damage the ion source Step 6 It is good pract...

Page 17: ...equired Pump down the vacuum chamber Leak check all vacuum ports that have been affected Slowly open the coolant water valve Watch for a rise in chamber pressure from an internal leak and look for any external leaks potentially introduced during shipping Check proper operation of the gas supply to the source and RFN The source should now be ready for operation If you are unsure of any item please ...

Page 18: ... RFN ION BEAM RF SOURCES MANUAL Chapter 3 Specifications SPECIFICATIONS SOURCE BEAM CURRENT BEAM VOLTAGE GRIDS COOLING 6 cm 25 200 mA 50 1500 V molybdenum or graphite antenna 12 cm 50 400 mA 50 1500 V molybdenum or graphite antenna and shroud 16 cm 100 1000 mA 100 1500 V molybdenum or graphite antenna and shroud 23 cm 200 1500 mA 100 1250 V molybdenum antenna 6 x 22 cm 50 500 mA 50 1500 V molybden...

Page 19: ...ORMANCE DATA USING ARGON 8 SCCM BEAM ACCELERATOR RF POWER NEUTRALIZER Voltage V Current mA Voltage V Current mA Forward W Reflected W Emission mA 100 100 500 14 258 1 150 250 100 350 14 256 0 150 500 150 300 12 373 1 225 1000 200 250 2 446 2 300 1250 200 150 2 412 2 300 1500 200 150 2 391 2 300 100 1500 50 floor 100 1 80 1 75 50 idle 50 typical 150 idle 500 ...

Page 20: ...ERFORMANCE DATA USING ARGON 10 SCCM BEAM ACCELERATOR RF POWER NEUTRALIZER Voltage V Current mA Voltage V Current mA Forward W Reflected W Emission mA 250 150 300 3 143 0 225 500 150 300 4 139 0 225 750 200 250 5 163 0 300 1000 400 250 9 280 0 300 1250 400 200 8 270 0 600 1500 400 200 7 260 0 600 250 1500 50 floor 250 1 91 0 75 50 idle 60 typical 200 idle 500 ...

Page 21: ...ING ARGON 18 SCCM BEAM ACCELERATOR RF POWER NEUTRALIZER Voltage V Current mA Voltage V Current mA Forward W Reflected W Emission mA 250 300 550 11 199 0 450 500 300 400 8 193 0 450 750 450 300 17 266 0 675 1000 600 350 18 347 1 900 1250 600 250 15 352 2 900 1250 800 400 24 485 4 1200 1500 800 250 20 475 3 1200 250 1500 100 floor 200 3 94 1 150 50 idle 40 typical 250 idle 500 ...

Page 22: ...ATA USING ARGON 20 SCCM BEAM ACCELERATOR RF POWER NEUTRALIZER Voltage V Current mA Voltage V Current mA Forward W Reflected W Emission mA 100 1000 1000 58 510 0 1500 250 1000 750 64 460 0 1500 500 1100 500 62 450 0 1650 750 1250 300 55 520 0 1562 1000 1500 250 59 640 0 2000 1250 1500 250 60 630 1 2000 100 1500 300 floor 200 16 125 1 450 30 idle 90 typical 150 idle 500 ...

Page 23: ...Voltage V Current mA Voltage V Current mA Forward W Reflected W Emission mA 100 250 600 11 387 3 375 250 300 500 15 435 4 450 500 300 400 13 485 3 525 1000 450 200 12 464 4 525 1250 500 200 12 453 4 525 1500 500 200 12 450 4 600 100 1500 100 floor 200 3 210 3 150 50 idle 20 typical 200 idle 500 The 6x22 cm source can only use 6x22 grid assemblies molybdenum The 6x30 cm source can use 6x22 cm grid ...

Page 24: ... BEAM CURRENT BEAM VOLTAGE RF GENERATOR interface box IBOX 703 1 0 600 mA 1500 V 500 W no 703 1 1 600 mA 1500 V 500 W yes 703 2 0 800 mA 1500 V 500 W no 703 2 1 800 mA 1500 V 500 W yes 703 4 0 1000 mA 1500 V 500 W no 703 4 1 1000 mA 1500 V 500 W yes 701 6 1 2 1500 mA 1250 V 1000 W external yes Size w x h x d 19 x 7 x 20 weight 23 1 kg ...

Page 25: ...The desired amount will vary with source size but typical values for a system that has a 5000 L s pump are tabulated below These flow rates can be scaled with the system pumping speed and watching the overall chamber pressure Best practice is to allow the gas to flow 5 minutes to purge the gas lines prior to source ignition VACUUM SPECIFICATIONS PARAMETER VALUE COMMENTS Chamber base pressure 10 6 ...

Page 26: ...upply manual for menu navigation and the location of these parameters Start detect current I 5 mA Neutralizer Emission to Beam current ratio E B 150 TIP Best practice is to connect the water flow interlock in series to the power supply interlock Please check the power supply manual for proper interlock specifications TIP Under base pressure conditions with source gas off turn the water flow ON and...

Page 27: ...ss than 10 of the beam current The RF Source and RF Neutralizer reflected power is dependent upon the matching networks and how well they are tuned Step 6 Select desired beam conditions Set the beam and accelerator voltage for the desired condition Study the data in Chapter 3 Specifications to select the appropriate beam current beam voltage and accelerator voltage For applications that are ion be...

Page 28: ...dicate the source discharge has extinguished and display an error E71 The source should be allowed to warm up for at least 20 minutes This will allow it to release trapped water vapor and other gases It is essential the source is warm before the beam is turned on otherwise the grids will arc and the source may extinguish Step 8 Turn the beam on Turn the beam on by pressing the BEAM button In MANUA...

Page 29: ...ions in LOCAL or REMOTE mode The RFN will ramp to its idle conditions For critical applications the beam can be turned off using an electronic remote switch or via a software command to the power supply Please refer to the power supply manual for additional information Step 11 Turning off the source and cool down The source and beam if on are shut off by pressing the SOURCE button The power supply...

Page 30: ... ION BEAM RF SOURCES MANUAL Chapter 5 Advanced Operation This chapter will provide a more in depth description of the source operation It is designed to add more detail to the previous chapters and is divided into 3 main sections These are grid theory source ignition and techni cal tips Section 5 1 Grid Theory Extraction and acceleration of plasma ions The plasma created in the discharge chamber w...

Page 31: ...comes back up a medium sized hill then continues at constant velocity kinetic energy across a flat region A roller coaster that is traveling at velocities reaching km s Grids the takeaway The Screen grid will Apply potential to the plasma in the discharge chamber Starts the process for ion acceleration and sets up the ion trajectories The Accelerator grid will Accelerate the ions and focus them to...

Page 32: ...dle of the beam to obtain a beam profile The figure below illustrates this concept Best practice is to select the grid style as the first priority Please see our Grid Selection Guide on our website and call for assistance Once grids are selected there will be very limited adjustment to the individual beamlet focusing Beam takeaway Ion distribution energy dose incidence angle all have strong effect...

Page 33: ...e ion leaving the source will eventually pickup an electron from the vacuum tank environment which is ground So for every ion that leaves the source an electron will be collected at the screen grid and will be detected as beam current However Electron Backstreaming If the accelerator grid voltage is set too low it is possible for downstream electrons from the neutralizer to migrate into the discha...

Page 34: ...ccelerator grid does not have an electrical connection or potential and downstream electrons can freely see the positive potential of the screen grid In LOCAL mode the RF power will start to drop as the power supply thinks there is sufficient beam current If the source is left unattended this type of backstreaming can damage the accelerator grid and power supply The symptoms of an open circuit on ...

Page 35: ...the charge exchange reaction Accelerator current can also arise from direct impingement of the beam ions i e a severe backstreaming case Both situations will induce accel grid erosion and reduce grid life The grid erosion from charge exchange is proportional to the accelerator voltage as this sets the ion energy The sputtering of the accelerator grid may induce unwanted contamination for some proc...

Page 36: ... self starting characteristic For additional information about the RFN please refer to the RFN manual BV Pulse Regardless if the source self starts it utilizes electrons from the RFN as an ignition source After the RFN has started the source will apply the RF power to its antenna and when the RF power level reaches the RF START power a relay on the accelerator power supply is used to connect the s...

Page 37: ...rce is ON and beam is OFF When the beam is turned ON the accel relay releases so the accelerator grid is biased using its own supply START DETECT I The mechanism by which the power supply recognizes a discharge has started is the monitoring of the beam current during the idle setting In idle mode if the beam current is greater than the start detect current START DETECT I the source is considered t...

Page 38: ...etting of 65 W and idle emission current of 500 mA A feedback control loop monitors the emission current and adjusts the bias voltage on the collector supply up or down as needed to keep the emission current at target 3 After the RFN has started the RFN RF power will remain at an elevated warm up power level for 5 minutes During this time the RF power is higher than appropriate for the 500 mA emis...

Page 39: ...AL mode the I BEAM will ramp the RF power to reach the RF power setting RFS FWD POWER and the beam current is not automatically controlled 11 Simultaneous with step 10 the neutralizer emission current will change If the power supply is in MANUAL mode the emission current is determined by the settings in the neutralizer module If the power supply is in LOCAL or REMOTE mode the emission current will...

Page 40: ...he ion energy V Ultimate temperature will be a function of rate and method of cooling and the rate of heat delivery by the beam Heat is also generated inside the ion source from the application of RF power and creating a discharge To combat this the RF antenna is water cooled as is the source shroud for most ion sources Heat is also eliminated radiatively to the chamber however radiant heat is neg...

Page 41: ...ially near the edge of the grid Grids are usually replaced when this type of wear becomes excessive Delamination can occur when the molybdenum is nearing its end of life Layers of material begin to separate between grid holes The layers will distort and can peal back Delamination will occur when grids have been cleaned numerous times It can also be triggered when grids have been cleaned too aggres...

Page 42: ...m system and large enough to provide a staging area for disassembly cleaning and inspection Tools Clean room approved gloves for handling all exposed source and RFN parts Tools for disassembly and assembly clean and oil free Torque wrench to 30 in lbs Cleaning equipment Media blaster with 150 grit Aluminum Oxide media Hot water filtered to 3 microns Ultrasonic tank for final detergent cleaning Mic...

Page 43: ... Section 6 2 Schedule The time for maintenance will be determined by the specifics of the process and how the ion beam source was used The more common maintenance issues for a source in a sputter deposition system i e worst case scenario are presented in the table below Please contact us for assistance with setting up the maintenance schedule ION BEAM RF SOURCES MANUAL Chapter 6 Maintenance SCHEDU...

Page 44: ...hield and block the RF from penetrating the discharge chamber The RF power on the source may slowly rise so it is important to clean this occasionally Common issues with mounting hardware The hardware that supports the grids and discharge chamber will slowly become coated with the process materials If this coating becomes too thick it can detach and create unwanted particulates This group of hardw...

Page 45: ... electrically conductive Best practice is to replace the cooling lines with new pieces of equal material and length 2 5 m The RF power will also climb sometimes rapidly if there is a connection issue with the RF strap between the matching network and feedthrough After many years of service the strap can oxidize with a black tarnish and become loose In addition to monitoring RF power visual inspect...

Page 46: ...elves easily say with a multi meter as it may be a plasma short or an open connection that creates the issue This chapter is divided into Common Errors are presented first as a quick fix Many errors and alarms are captured by the I BEAM supply These error codes are provided next Next the RFN issues are presented since it needs to start before the source The following section will be covering issue...

Page 47: ...tching network when the RFN is cold at room temperature Source will not tune to START POWER because the matching network controller is turned off or its switches are in MANUAL mode they need to be in REMOTE mode Facility coolant supplied to the source is conductive which will result in RF losses The typical RF power will not be sufficient to start the source until the proper coolant is supplied No...

Page 48: ...trical short Check electrical connections 2 Plasma short Check the source and feed through for wire proximity problems or coated insulators 3 Electrical short Check for flakes or debris 05 fatal Interlock is open 1 Water flow Check water flow 2 Vacuum Check vacuum interlock 3 Interlock cable is not connected Check cable and connections 06 fatal Module is at over temperature 1 Cooling issue Make su...

Page 49: ...g Issues RF power ramped down too far during idle mode overshot Check matching network for correct operation are motors working damaged connections and verify gauge position on matching network controller is the red LIMIT light on 4 RF circuit tuning disturbance Check RF path from matching network feedthrough vacuum leads and antenna 5 Sudden or momentary open circuit to grids 6 Gas Flow Interrupt...

Page 50: ...e operation of the beam for any arcing or unusual behavior Check grid condition and proper assembly Check for signs of arcing behind the discharge chamber plasma shorts Check for water leak or other high pressure Plasma short There might be a gap between the grid assembly and the mounting hard ware A plasma leak may impinge on the RF antenna and create a momentary tuning disturbance which will ext...

Page 51: ... and retest 2 Process gas is contaminated because process gas line is not electropolished stainless steel between bottle and chamber Correct gas line material 3 RFN gas flow incorrect level Check MFC setup and compare flow to chamber pressure ratio Also inspect for vacuum side gas line damage 4 Collector is poisoned damaged or assembly issue Service or replace RFN 5 Conductive coating inside ceram...

Page 52: ...for guidance After 20 to 60 minutes normal operation emission becomes unstable or can t reach request or goes out Running issues 1 Collector is loose Service the RFN and use extreme care to ensure no rotation of gas isolator during RFN installation as rotation will loosen collector nut 2 Poor RF efficiency due to RF antenna is loose or has become mis shaped with age and thermal cycling Service the...

Page 53: ...ignment spacing and positioning Check to ensure antenna is not electrically connected to ground 3 Failing RF circuit connection Visually inspect RF circuit between matching net work and the source Look for loose connections oxidized hardware or failed capacitors 4 RF generator issues Check RF generator for alarms Beam voltage does not pulse to high voltage value Source fails to start step 3 1 Chec...

Page 54: ...er leak Check system for water leaks RF power abnormally low deposition rate abnormally low and accelerator current abnormally low or zero 1 Open circuit to accel grid accelerator voltage not reaching grid Check accel tab position and ohm out atmosphere side feedthrough to grids Note grids may be catastrophically damaged within a few hours if beam is operated with open accelerator 2 Discharge cham...

Page 55: ... 2 Accel grid is coated with dielectric material Clean the accel grid 3 Debris or flakes are in proximity to the grids or peeling and falling onto the grids Check and clean the screen and accel grid or source of peeling May need to clean vacuum chamber near source 4 Grids have contamination Clean grids ultrasonically in Micro 90 and water Rinse and wipe with alcohol Bake grids under a heat lamp to...

Page 56: ...awing Part number The grid assembly part number will be located in the title block on the lower right hand corner Additional information such as revision number is also located in the same area Parts list The bill of materials BOM or parts list will usually be in the upper left hand corner This list contains all of the parts utilized within the grid assembly Exploded view Most of the drawing will ...

Page 57: ...part numbers and drawings for the RF neutralizer Dimensions are in inches RFN PARTS PART NUMBER DESCRIPTION 504424B RFN assembly 504425B Gas isolator assembly for RFN 504687A RFN refurbish kit includes collector 504136 RFN discharge chamber Refurbish service Please contact us if you would like us to service the RFN ...

Page 58: ...ensions are in inches 6 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 06RF 6 cm source Includes shroud antenna grid mount plate and discharge chamber 507042A 6 cm grid mount hardware kit includes discharge chamber 505830A 6 cm RF discharge chamber assembly 504330 RF antenna insulator 505856A 6 cm RF antenna assembly grid assemblies please visit our website for a complete listing ...

Page 59: ...59 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Flange mount interface kit part number 505865A ...

Page 60: ...60 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Internal mount interface kit part number 505864A ...

Page 61: ...s are in inches 12 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 12RF08 12 cm source Includes shroud antenna grid mount plate and discharge chamber 505190A 12 cm grid mount hardware kit does not include discharge chamber 504211A 12 cm RF discharge chamber assembly 504330 RF antenna insulator 504320A 12 cm RF antenna assembly grid assemblies please visit our website for a complete listing ...

Page 62: ...62 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Flange mount interface kit part number 504904A ...

Page 63: ...63 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Internal mount interface kit part number 504905A ...

Page 64: ...s are in inches 16 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 16RF08 16 cm source Includes shroud antenna grid mount plate and discharge chamber 505161A 16 cm grid mount hardware kit does not include discharge chamber 504210A 16 cm RF discharge chamber assembly 504330 RF antenna insulator 504370A 16 cm RF antenna assembly grid assemblies please visit our website for a complete listing ...

Page 65: ...65 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Flange mount interface kit part number 504901A ...

Page 66: ...66 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Extension flange mount interface kit part number 504902A ...

Page 67: ...67 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Internal mount interface kit part number 504903A ...

Page 68: ...68 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Flange mount interface kit part number 505037A ...

Page 69: ...e in inches 23 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 23RF 23 cm source Includes shroud antenna grid mount plate and discharge chamber 507281A 23 cm grid mount hardware kit does not include discharge chamber 507074 23 cm body backplate discharge chamber ceramic 504330 RF antenna insulator 507071A 23 cm RF antenna assembly grid assemblies please visit our website for a complete listing ...

Page 70: ...70 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Flange mount interface kit part number 507226A ...

Page 71: ...71 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Internal mount interface kit part number 507178A ...

Page 72: ...6x22 cm RF source Dimensions are in inches 6X22 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 06x22RF 6 x 22 cm source Includes shroud antenna grid mount hardware and discharge chamber 505883 6 x 22 cm body backplate discharge chamber ceramic 504330 RF antenna insulator grid assemblies This source uses 6x22 grids only Please visit our website for a complete listing ...

Page 73: ... sources Dimensions are in inches 6X30 CM RF SOURCE PARTS PART NUMBER DESCRIPTION 06x30RF 6 x 22 30 cm source Includes shroud antenna grid mount hardware and discharge chamber 505799 6 x 30 cm body backplate discharge chamber ceramic 504330 RF antenna insulator grid assemblies This source can use 6x22 or 6x30 grid assemblies Please visit our website for a complete listing ...

Page 74: ...74 ION BEAM RF SOURCES MANUAL Chapter 8 Parts and Drawings Internal mount interface kit part number 505890A The same interface kit works for the 6x22 cm and the 6x30 cm sources ...

Page 75: ...s would be identical for other grid assemblies Graphite grids are not typically cleaned due to their fragile nature but they can be lightly sanded in some cases A Disassembly Insert grid assembly into acrylic jig with the decelerator grid face down and remove the 6 32 nuts around the grid set Lift each grid from the assembly and place on a clean surface Measure all spacing washers during removal t...

Page 76: ... of each grid to confirm ears are flat Measure dome heights again on a granite block Capture the same locations as the before measurements Document each measurement as the after for the screen accel and decel grids The dome heights should match at the same location for each grid There will be some variation to within 003 at identical locations The variation usually is between grids with larger hol...

Page 77: ... heat lamp for 15 minutes F Hardware cleaning For grid mount assembly hardware cleaning follow procedures C and E described previously Media blast all ceramic insulators Place in micro90 and ultrasonic bath for 20 minutes Remove and rinse in hot water thoroughly Rinse with isopropyl alcohol and place on a clean room wipe Place under a heat lamp for 15 minutes Replace coated metal fasteners or medi...

Page 78: ...he decel grid Install the hats and ground strap Note that there are two different styles of hats Use the set with the larger holes 5 16 ID in the center and mount them to the DOWNSTREAM side Attach the accel strap to the accel grid on the downstream side Clean the polycarbonate grid assembly jig and place on the work surface Line up the 6 32 x 7 8 screw female ceramic insulator and metal 500x 313x...

Page 79: ...crews hat side down and line up the serial number and strap with the markings on the fixture As per the drawing place flat washers and a male insulator over the screws with the male side up Refer to drawing Face each screw upwards Add the washers and insulators which then form the decel to accel spacing Add the decel grid with hats downward They should catch into the jig ...

Page 80: ...or proper washer sequence Center the insulator and washers on the screw and place in the assembly jig Install the hats on the screen grid These are the hats with the smaller holes 6 and mount them to the UPSTREAM side Place the screen grid over the screws hat side up and line up the serial number with the accel grid and markings on the fixture Add the accel grid to the stack Place the screen grid ...

Page 81: ...to the alignment holes all the way down into the jig rotating while inserting Do not force them Adjust the positions of the grids as needed When aligned tighten the nuts to a snug condition Use a torque wrench to tighten the nuts to at between 12 and 15 inch pounds Over tightening will damage the ceramic insulators Add the final hardware Finish tightening using a torque wrench With alignment pins ...

Page 82: ...sting Using an insulation tester connect to opposing grids and test to 1000V Resistance should stay in the GΩ range Confirm the grids are not shorting arcing or leaking current Check for any conductive particles between the grids Conduct this test between the screen and accelerator grids and between the decelerator and accelerator grid Also check screen to ground it should read as an open If it fa...

Page 83: ...n optics are constructed from molybdenum graphite or titanium and are available in a variety of shapes and sizes We also carry a healthy assortment of spare parts including discharge chambers insulators and many other items to keep your source running CUSTOMER SERVICE SUPPORT Whether in research or production Plasma Process Group is committed to providing the best support in the industry Help is a...

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