PIE Tergeo-EM, Operator'S Manual

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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Getting familiar with the system ........................................................................................................ 19
Assembly procedure ........................................................................................................................... 21
Getting started .................................................................................................................................... 23
Chapter 8 Operation ................................................................................................................................... 25
8.1 General guidance. ............................................................................................................................. 25
8.2 Sequence of operation. ..................................................................................................................... 25
8.3 Understand the main screen layout ................................................................................................. 26
8.4 Manual operation ............................................................................................................................. 27
8.4.1 Pumping down the chamber. ..................................................................................................... 27
8.4.2 Set the gas flow rate .................................................................................................................. 27
8.4.3 Set up the timer ......................................................................................................................... 27
8.4.4 Change the cleaning mode ........................................................................................................ 27
8.4.5 Set up the rf power supply ......................................................................................................... 27
8.4.6 Stop the process manually ......................................................................................................... 28
8.4.7 Vent the chamber. ..................................................................................................................... 28
8.5 Set up recipes in recipe library. ......................................................................................................... 28
8.6 Run a cleaning recipe ........................................................................................................................ 30
8.6.1 Load a recipe to the main screen. .............................................................................................. 30
8.6.2 Turn on the vacuum pump ......................................................................................................... 30
8.6.3 Execute the recipe ..................................................................................................................... 30
8.6.4 Execute a job sequence ............................................................................................................. 32
8.7 Tune the impedance ......................................................................................................................... 32
8.8 What to do after plasma cleaning finishes. ...................................................................................... 32
8.9 How to reduce the pumping down time and achieve better vacuum level? ................................... 33
8.10 How to reduce the venting time? ................................................................................................... 34