PI P-616 NanoCube, User Manual, Page: 43 / 51

10 Technical Data
P-616 NanoCube® XYZ Nanopositioner PZ268D Version: 1.1.0 39
Subject to change. You can find the latest product specifications on the product web page at
www.pi.ws (https://www.pi.ws).
In this Chapter
Specifications ............................................................................................................................... 39
Dimensions .................................................................................................................................. 42
Torque for Stainless Steel Screws (A2-70) ................................................................................... 43
Pin Assignment ............................................................................................................................ 43
10.1 Specifications
10.1.1 Data Table
P-616.3C Unit Tolerance
Motion and positioning
Active axes X, Y, Z
Travel range at -20 to 120 V, open
loop
110 / axis µm +20 % / -0 %
Travel range, closed loop 100 / axis µm +20 % / -0 %
Resolution, 1 σ , open loop
0.3 nm Typ.
Resolution, 1
σ
, closed loop 0.4 nm Typ.
Linearity error 0.03 % Typ.
Bidirectional repeatability, 1
σ
, 10 %
travel range
<10 nm Typ.
Bidirectional repeatability, 1 σ , 100 %
travel range
<15 nm Typ.
Sensor
Sensor type Capacitive sensors
Mechanical properties
Stiffness 0.5 N/µm ±10 %
Resonant frequency X / Y / Z,
unloaded
700 Hz ±10 %
Resonant frequency with 30 g load X /
Y / Z
380 Hz ±20 %
Resonant frequency with 100 g load X
/ Y / Z
250 Hz ±20 %
10 Technical Data