10 Technical Data
L-738 / V-738 Precision XY Stage
MP183E
Version: 1.1.2
39
L-738.053111 / L-738.053112 / L-738.053132
L-738.053111
L-738.053112
L-738.053132
Unit
Tolerance
Motion and positioning
Active axes
X, Y
X, Y
X, Y
Travel range
102 × 102
102 × 102
102 × 102
mm
Integrated sensor
Incremental linear
encoder with
sin/cos signal
transmission
Incremental linear
encoder with A/B
quadrature signal
transmission
Incremental
rotary encoder
Sensor resolution
20000
cts/rev
Design resolution
0.001
0.01
0.1
µm
Sensor signal period
20
µm
Minimum incremental motion 0.1
0.1
0.4
µm
typ.
Unidirectional repeatability
0.1
0.1
0.4
µm
typ.
Bidirectional repeatability
±0.5
±0.5
±2
µm
typ.
Reference point switch
repeatability
<1
<1
<1
µm
typ.
Angular error xry (pitch)
±40
±40
±40
µrad
typ.
Angular error xrz (yaw)
±20
±20
±20
µrad
typ.
Angular error yrx (pitch)
±40
±40
±40
µrad
typ.
Angular error yrz (yaw)
±20
±20
±20
µrad
typ.
Straightness / flatness
±2
±2
±2
µm
typ.
Orthogonality
±96.963
±96.963
±96.963
µrad
typ.
Velocity
50
50
90
mm/s max.
Reference and limit switches
optical
optical
optical
Mechanical properties
Drive screw type
Ball screw
Ball screw
Ball screw
mm
Drive screw pitch
2
2
2
Holding force, power off
20
20
20
N
typ.
Push/pull force Fx, Fy power
on
100
100
100
N
max.
Load capacity
200
200
200
N
max.
Permissible torque Mx in θX
,
θY
130
130
130
Nm
max.
Permissible torque Mz in θZ
90
90
90
Nm
max.
Guiding
Recirculating ball bearing
Mass
24
24
24
kg
±5 %
Moved mass in X, unloaded
14.6
14.6
14.6
kg
±5 %
Moved mass in Y, unloaded
5.8
5.8
5.8
kg
±5 %
