Connection of hexagon head set screw and tapped hole
1
.5
×
d
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Place the collar flange over the high vacuum flange on the turbopump.
3. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
4. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
5. Utilize all prescribed components for the turbopump.
6. Screw the hexagon head set screws into the tapped holes.
– Observe the minimum tensile strength of the flange material and the screw-in depth.
7. Tighten the hexagon head set screws in 3 stages in opposite pairs.
– Tightening torque:
5, 10, 16 ± 1 Nm
Connection of stud screw and tapped hole
2
.5
×
d
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Screw the required number of stud screws with the shorter screw-in end into the holes in the
counter flange.
– Observe the minimum tensile strength of the flange material and the screw-in depth.
3. Place the collar flange over the high vacuum flange on the turbopump.
4. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
5. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
6. Utilize all prescribed components for the turbopump.
7. Tighten the nuts in 3 stages in opposite pairs.
– Tightening torque:
5, 10, 16 ± 1 Nm
Connection of stud screw and through-bore
1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Place the collar flange over the high vacuum flange on the turbopump.
3. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
4. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
5. Utilize all prescribed components for the turbopump.
6. Tighten the nuts in 3 stages in opposite pairs.
7. Tightening torque:
5, 10, 16 ± 1 Nm
5.2.9 Attaching CF flange to CF-F
The connection types for CF installation with CF flange are:
Installation
26/58
