6.2 Starting the pump
6.2.1 Powering on
► Set the 48 VDC power supply switch to
I
: the electronic drive unit boots up.
– At the end of initialization, the yellow LED turns off and the green LED turns on.
6.2.2 Pumping start-up
The following steps describe the use of the pump regardless of the control panel. Refer to the "Control
Panel" chapter for the wiring and configuration of the different interfaces, as well as the following chap-
ters:
● Use via
HHR
(see chapter “Control via the HHR”)
● Use via
Remote
control (see chapter “Control via the Remote connector”)
● Use via
RS-232/RS-485
serial link (see chapter “Command via the RS-232/RS-485 serial link”)
● Use via
Fieldbus
(see chapter “Operation via fieldbus”)
V3
Turbo
P
N2
V2
V1
V4
Exh.
IN
Fig. 15:
Pumping installation diagram
Components in the pumping installation
V1
1)
Fore-vacuum isolation valve
N2
Inert gas purge inlet
V2
1)
High vacuum isolation valve
Turbo
Magnetically levitated turbomolecular pump
V3
1)
Purge solenoid valve (option)
P
1)
Backing pump
V4
1)
Air inlet solenoid valve (accessory)
1) The supply, power supply and control of these components are the customer's responsibility.
Pumping start-up procedure
Initial conditions:
Valves V1, V2, V3, V4 are connected and controlled by the equipment (customer’s installation).
The vacuum chamber and the pumping lines are at atmospheric pressure, the backing pump is stopped
and the valves are closed.
1. Start up the cooling circuit.
2. Send a pump
‘Start’
order via the HHR, Remote, serial link or fieldbus control panel:
– The backing pump starts up and valves V1 and V2 open.
– The turbomolecular pump starts to
reach the selected speed
.
3. Depending on the application, open the V3 purge solenoid valve (if installed and wired).
The pumping operation is performed until the operating pressure for the customer’s application is
reached.
Stand-by speed
The Stand-by speed is selected when the pump is stopped or rotating.
► Send a
‘Stand-by’
order via Remote, serial link or fieldbus control panel or press the
STD-BY
key
of the HHR interface.
Temperature management (MT pump version)
► Select the temperature setpoint via the the HHR, serial link or fieldbus control panel.
For more information about temperature management, see chapter “Pump Temperature management
system”.
Operation
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