4.2 Human/Machine Interface
3
2
1
6
7
4
5
Fig. 1:
Description of an M version ATH 500 pump
1 Inlet flange (high vacuum)
5
Control interface
2 Splinter shield
6
Neutral gas purge (50 sccm) (1/8 BSPP fe-
male equipped with a filter)
3 WATER IN/WATER OUT connections
(1/8 NPT female)
7
Exhaust flange (PUMP EXHAUST)
4 Electronic drive unit
1
2
3a
3
3b
8
7
6
5
4
Fig. 2:
Description of an MT version ATH 500 pump
1
Inlet flange (high vacuum)
4
Electronic drive unit
2
Splinter shield
5
Control interface
3
Water solenoid valve
6
Neutral gas purge (50 sccm) (1/4 VCR)
3a WATER IN connection (1/4 double ring)
7
Exhaust flange (PUMP EXHAUST)
3b WATER OUT connection (1/4 double ring)
8
Heater band
Product description
19/78
