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System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY
.
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This section gives guidance for the uninstallation of an
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system prior to moving it to
another location or disposing of it. Guidance is also given for the disposal of a system.
The guidance given is by necessity of a general nature; detail will vary depending on system
type, customer’s site, etc.
IMPORTANT: BEFORE UNINSTALLING THE SYSTEM, ENSURE THAT ALL PERSONNEL WHO WILL BE
INVOLVED HAVE READ AND UNDERSTOOD SECTION 1 ‘HEALTH AND SAFETY’ OF
THE SYSTEM MANUAL.
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To uninstall the system, carry out the following sub-sections in sequence.
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The main use of this document will be when a customer requires to move a system to another
location. This will involve uninstalling the system, moving the system components and then
reinstalling the system. An important consideration is the length of time between shutting
the system down and powering the system up. The longer the system is shut down, the
greater the need to remove as much residue gas as possible.
It is very important that the customer follows the pump manufacturer’s instructions for
purging pumps prior to shut down. For periods of more than a few days shutdown, 24 hours
of N
2
purging is often recommended.
If the system is to be reinstalled, the vacuum system should be left fully vented with dry
nitrogen, with the pump and gas supply service points capped.
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1)
Chamber
plasma cleaning should be conducted to remove residues. Use the
normal cleaning process according to the most recent use of the tool.
2)
Process gas supply lines must be pumped down using the system at least as far as the last
isolation valve upstream from the gas pod. Consider whether the gases should be
pumped out back to the cylinder, or whether the gas installation has alternative means of
exhausting hazardous gases. For shut down periods of longer than two days, purge the
gas lines with N
2
.
3)
Precursor gas delivery lines must be pumped and purged to the source pot connection.
Refer to Appendix PSP (Precursor Source Pot installation and Decommissioning).
4)
Pump the system according to the following criteria:
Pump the system for one hour with a small N
2
or Argon flow, and then pump for a
further hour with no gas flow.
1
For OpAL system, refer to Section 6 (Maintenance) of the System Manual.
2
Run a SF6 / O2 plasma for > 1 hour at ~250W
Uninstallation and Disposal
Issue 1: February 00
Page 9-2 of 6
Printed: 7-Oct-07, 12:11
Summary of Contents for OpAL
Page 14: ......
