C H A P T E R 10
7/26/00
INTEGRA Operations Revision A
10-1
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
A L A R M S
INTRODUCTION
10
The Integra is designed with numerous sensors which monitor the
various system activities. If there is a failure in the system, an alarm
is generated. Each alarm generates a system response. There are
several types of responses which accompany the alarms. The major
types
of alarm responses are:
alarm is posted, but no action is taken.
system is put into CLEAR or CLEARING mode.
system is put into STOP mode.
Input Station processing will not dispense wafers until the
problem is corrected or some processing condition is met.
processing in a particular station will be halted until the problem
is corrected or some processing condition is met.
Integra is equipped with GEM software (Chapter 11) to interface
with Input and Output Robot systems. GEM software (cleaner and
host) uses both Integra system specific alarms and GEM messages. In
this chapter, Integra specific alarms are presented first, followed by
GEM messages and alarms.
A
NOTE:
GEM messages appear on all Integra systems equipped with GEM software. All
alarms for OS9 software versions prior to and including ver 2.2.3 are presented in this
chapter.
Summary of Contents for Synergy Integra
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