9-58
INTEGRA Operations Revision A
7/26/00
20-0200-231 (CR), 20-0200-232 (Std), 20-0200-251 (CD)
The MEGASONIC SWEEPS button is used to display the
NUMBER PAD
and set the number of
sweeps
that will take place
during the EVENT. In this setting, a
sweep
is defined as the
travel cycle of the megasonic arm from the wafer edge to the
wafer center, and back to the wafer edge.
The SECONDS/SWEEP button is used to display the
NUMBER
PAD
to set the time in
seconds
allowed for the megasonic arm to
complete a sweep. In this setting, a
sweep
is defined as the time it
takes the megasonic arm to move from the edge of the wafer to
the wafer center. The sweep time must be multiplied by two (x2)
to get the total time allowed for the arm to move to the wafer
center and back to the wafer edge. The
total time
for one center-
and-back sweep, multiplied by the number of sweeps, is used to
calculate the EVENT duration time.
9
SET THE
SECONDS/SWEEP FIRST
. Touch the SECONDS/
SWEEP button to display the
NUMBER PAD
to set the number of
seconds
required for the megasonic arm to move from the edge of
the wafer to the center. Enter the number of
seconds
for the sweep,
and touch ENTER.
10
SET THE MEGASONIC SWEEPS AFTER SETTING
SECONDS/SWEEP
. Touch the MEGASONIC SWEEPS button to
display the
NUMBER PAD
to set the number of total sweeps per
EVENT. Enter the number of sweeps and touch ENTER.
Remember to set the MEGASONIC SWEEPS to a number which
can be completed within the time limit set for the EVENT.
11 To DEACTIVATE the Megasonic Arm, use either of the following
procedures.
11.1 If either of the MEGASONIC SWEEPS or the SECONDS/SWEEP
button displays a number other than “
0
,” touch the that button to
activate the
NUMBER PAD
. Enter
0
,
then touch ENTER. Both
numbers in each EVENT must be “
0
” for the megasonic system
to be deactivated and for processing to continue.
11. 2 If the toggle switch marked MEGASONIC GEN is in the
OFF position, the megasonic system is deactivated.
VIEW PROCESS RECIPE
Use the
VIEW PROCESS PROGRAM SCREEN
to view
all
the settings for
a specific Process Recipe. Settings can be recorded in a Process Recipe
log for permanent storage and reviews. Use either of the following
two procedures to view the
VIEW PROCESS PROGRAM SCREEN
.
Summary of Contents for Synergy Integra
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