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Maintenance
20
GA09313_0202 – (2008-02) –
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Oerlikon Leybold Vacuum
r
Insert a new ignition aid (10a) into the mounting tool.
s
Carefully press the anode (clean or new)
centered and parallel to the tool axis into the
ignition aid and insert it to a depth of approx.
15 mm. The final positioning is established
after the anode is installed.
Ignition aid
Mounting tool
Anode
Cleaning the Pirani element
n
Remove the FPM seal (13a) from the Pirani element (13).
o
Fill the Pirani measuring tube with cleaning alcohol and let it work.
p
Pour the alcohol out of the tube.
q
Dry the tube (e.g. with a blow dryer <150
°
C).
r
Slide a new FPM seal over the Pirani element and insert it into the corre-
sponding groove.
s
Reinstall the Pirani element (
→
section 6.2.3).
Replacing the Pirani element
If it is severely contaminated or defective.
n
Slide a new FPM seal (13a) over the Pirani element (13) and insert it into
the corresponding groove.
o
Mount the Pirani element (
→
section 6.2.3).
6.2.3
Reassembling the Transmitter
n
Insert the FPM seal (11) with the support ring (12) centered into the
measuring chamber (7). The sealing surface, seal, and ceramic part must
be clean.
o
Carefully insert the anode (10) incl. ignition aid (10a) into the measuring
chamber.
p
Insert the Pirani element (13) with the FPM seal (13a) slid over it into the
corresponding bore hole.
q
Carefully place the pressure piece (9) on the measuring chamber and
tighten them with the three hexagon socket screws (8) incl. lock washers
(8a) uniformly until the stop position is reached.
r
Position the ignition aid (10a) by pushing the mounting tool over the anode
pin until the mechanical stop is reached.