©Newport Corporation
MKS Spectra-Physics Confidential
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Utility Requirements (Cont’d)
The Quasar laser head is water-cooled and does not require any other sort of cooling. The system
must be installed in a stable environment. The controller is force-air-cooled with a maximum
output power of ~ 300 Watts. The controller requires approximately 200 CFM of free-air-flow.
The air-flow direction is front-to-back (warm air exhausts out the rear of the controller).
Chiller
Feature
Specifications
Fluid temperature
20°C +/-0.5
Fluid flow rate
9.5 liter/min @ 210 kPa (2.5 Gpm @ 30 psi at laser head inlet)
Hose and Cable Lengths
There is a 2.5 m (8 ft.) 3-wire AC power cord, no plug (the customer must provide and
install the plug for this power cord).
The LASER HEAD control cable is a standard 5 m (16 ft.).
The SHUTTER control cable is a standard 5 m (16 ft.).
The air hoses with connectors are a standard 5 m (16 ft.).
