MKS Series 275 MiniConvectron, Instruction Manual

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Mini-Convectron Module Instruction Manual - 275513
59
Index
A
Analog output
voltage versus commonly used gas pressure 28
voltage versus N
2
or air pressure 29 – 31
voltage versus other gas pressure 28
wiring 20
Appendixes
Specifications 53
Theory of Operation 57
C
Calibration
at atmospheric pressure 44
at vacuum chamber pressure 45
Convectron gauge 22
Caution Notices & Symbols 7
Chapters
Installation 15
Maintenance 47
Operation 23
Commonly used gases 28
Components of module
with one relay, no display 15 , 25
with two relays, no display 15 , 26
with two relays, optional display 15 , 24
Connecting cable 19
Connections to vacuum chamber 17 , 55
Convectron gauge
calibration at atmospheric pressure 44
calibration at vacuum chamber pressure 45
internal volume 54
Pins 50
removal 51
replacement 51
sensing wire filament 54
setpoint relays 39 – 43
test 50
Customer service 47
D
Damage requiring service 47
E
Environment
System 11
F
Factory settings for module 46
FCC verification 14
Figures
15-pin connector, module with two relays 20
9-pin connector, module with one relay 20
Convectron gauge base 50
example test point voltage 42 – 43
ground connection to vacuum chamber 21
module dimensions 17
module orientation 18
module with one relay, no display 25
module with optional display 15
module with two relays, no display 24 , 26
module without display 15
output voltage versus N
2
or air pressure
0.1 Torr to 1000 Torr 31
1 mTorr to 100 mTorr 30
setpoint relay behavior 39
true pressure versus indicated pressure
10 -1 to 1000 Torr 34 – 35
10 -4 to 10 -1 Torr 33 , 36 , 37 , 38
Wheatstone bridge diagram 57
Fittings
1/8 NPT pipe thread 18
ConFlat flange fitting 19
KF flange 19
VCR type 19
Front panel features
with one relay, no display 25
with one relay, optional display 24
with two relays, no display 26
G
Ground
connection to vacuum chamber 21
wiring 21
Grounding Requirements 9
H
High Voltage 9
I
I/O connector
15-pin for module with two relays 20
9-pin for module with one relay 20
Indicators
analog setpoints 24 , 25 , 26
Installation 15
attaching module to vacuum chamber 18
calibrating Convectron gauge 22
configuring relays for application 22
locating and orienting module 16
module components 15
mounting position 55
pressure relief devices 16
wiring 19
Instructions
installation 15
maintenance 47
module operation 23
M
Maintenance 47
Convectron Gauge Pins 50
Convectron gauge removal 51
Convectron gauge replacement 51
Convectron gauge test 50
customer service 47
damage requiring service 47
failure symptoms, causes, and solutions 49
troubleshooting 48