MKS Granville-Phillips 358 series, Instruction Manual

Page: 70 / 122

Chapter 5
70
Series 358 Micro-Ion Controller Instruction Manual - 358013 - Rev. B
Normal Measurement Operation
Pressure indication:
P
i
= 10
V–11
Torr or mbar
Pi = 10
V–9
pascal
When Degassing
Pressure indication:
Pi = 10 V
–13.92
Torr or mbar
Pi = 10 V
–11.92
pascal
When the gauge is OFF
V = 11 volts
This signal voltage is determined by the pressure indicated on the Micro-Ion
Gauge display.
Figure 5-5 Micro-Ion Gauge Analog Output Versus Pressure