MKS EtherCAT 390 Series User Instruction Manual Download Page 4 | Manualshive

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EtherCAT

®

Communication Protocol Manual

– p/n 20018109-001 Rev. B

© 2019-2021 MKS Instruments, Inc. All rights reserved.

Granville-Phillips

®

and Micro-Ion

®

, are registered

trademarks, and mksinst™ is a trademark of MKS Instruments Inc. EtherCAT

®

is a registered trademark and

patented technology licensed by Beckhoff Automation GmbH, Germany. Windows

®

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No part of this work may be reproduced by any method including photocopying and recording or by any
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Summary of Contents for EtherCAT 390 Series

Page 1: ...EtherCAT Communication Protocol Manual p n 20018109 001 Rev B EtherCAT Communication Protocol User s Instruction Manual MKS p n 20018109 001 for Series 390 EtherCAT Transducers ...

Page 2: ... 12 Output Data of Modules 12 13 Semiconductor Device Profile Area 18 14 Value Range Setting 19 15 Exception Handling Data 19 16 Manufacturer Specific Device Data 21 17 SDP and CDP Device Specific Inputs 21 18 SDP and CDP Device Specific Outputs 22 19 SDP and CDP Device Specific Configuration Data 22 20 SDP and CDP Device Specific Information Data 23 21 SDP and CDP Device Specific Diagnosis Data 2...

Page 3: ...Data of Modules Objects 12 Table 15 Sensor Warning and Errors 17 Table 16 Semiconductor Device Profile Area Objects 19 Table 17 Exception Handling Data Objects 19 Table 18 SDP and CDP Device Specific Inputs Objects 21 Table 19 SDP and CDP Device Specific Configuration Data Objects 22 Table 20 SDP and CDP Device Specific Information Data Objects 23 Table 21 SDP and CDP Command Objects 24 Table 22 0...

Page 4: ...therCAT is a registered trademark and patented technology licensed by Beckhoff Automation GmbH Germany Windows is a trademark of Microsoft Corporation All other trademarks and registered trademarks are the properties of their respective owners No part of this work may be reproduced by any method including photocopying and recording or by any information or retrieval system without written permissi...

Page 5: ...herCAT knowledge or the specific use of EtherCAT Masters 2 Definitions Table 1 Common Definitions Term Definition B S Backup Save Backup Save Backup Save parameters are saved in NV memory CG Combo Gauge CoE CAN Application Protocol over EtherCAT CDP Common Device Profile ETG 5003 ESI Electronic Slave Information an XML file describing the device ETG EtherCAT Technology Group FoE File Access over E...

Page 6: ...s and one LED shows the Device State Figure 1 Control Panel Table 2 DB 15 Pinout Pin Pin Function Pin Pin function 1 No Connect 9 No Connect 2 No Connect 10 Relay 1 NC 3 24Vdc 11 Relay 1 COM 4 Power Return 12 Relay 1 NO 5 Analog Signal Output 13 Relay 2 NC 6 Analog Signal Common 14 Relay 2 COM 7 Chassis Ground 15 Relay 2 NO 8 No Connect Connector IN NC No Connection Pin Number Function Pin Number ...

Page 7: ...l Single Flash 100 ms ON 1000 ms OFF Safe operational Flickering 50 ms ON 50 ms OFF Bootstrap ON Operational EtherCAT Link Activity The Green LEDs on the 8P8C connectors indicate the link activity of the IN and OUT ports Table 3 8P8C LED Indications Link Activity Code Link Activity Condition ON Yes No Port open Flickering Yes Yes Port open Device State A bi color indicator is used to indicate the ...

Page 8: ... 3 Hot Cathode Ion 5 Process Data Objects Fast information flow polling rates up to 1ms according to ETG 5003 1 between Slave and the Master is ensured by the use of PDOs Important information i e pressure see Poll Current Pressure is mapped from the Object Dictionary into PDO objects Information about setting PDOs is found in Modifying PDO Mapping and ETG 1020 Per ETG 5003 2080 each Module has it...

Page 9: ... 0x01 32 Trip Point Output ALL Instance Limitations Not all TxPDOs can be mapped at once 68 bytes is the limit There may not be enough sub indexes in a module specific TxPDO object to map all of the module specific TxPDO mappable objects However any TxPDO object may be used to map any object that is TxPDO mappable 6 Object Dictionary Overview The Object Dictionary of Service Data Objects SDO is or...

Page 10: ...red in Non volatile memory Access Indicates if parameter is Read Only RO Read Write RW or Write Only WO Also indicate EtherCAT state restrictions For example WO PREOP indicates the parameter is only writable in PREOP state No state restriction indicates the parameter access is valid for PREOP SAFEOP and OP states Name Name of Object Object Parameter Description More info about Object Object Parame...

Page 11: ...on x x x 0x1018 Identity Object 0x01 UDINT RO Vendor ID MKS Vendor ID 1291 0x02 UDINT RO Product Code Unique product code 6010 GP 390 0x03 UDINT RO Revision Number Coded as 0xnnnnnn00 I E 0x01010100 1 1 1 0x04 UDINT RO Serial Number Always 0 Use Manufacturer Serial Number 0xF940 0x10F8 ULINT RO Timestamp Object Local time stamp of the device in nanoseconds ns 0x1600 RxPDO Absolute Piezo Default No...

Page 12: ...ppings available for the user Up to 8 entries can be configured 0x01 thru 0x08 PDO MAPPING R if SI SI0 W PREOP if SI 0 0x17FE RxPDO Combo Default No default outputs Can only write SI 0 0x00 0x17FF RxPDO Combo User Rx mappings available for the user Up to 8 entries can be configured 0x01 thru 0x08 PDO MAPPING R if SI SI0 W PREOP if SI 0 0x1A00 TxPDO Absolute Piezo Default No default entries Can onl...

Page 13: ...0x00 0x1A05 TxPDO Heat Transfer User Up to 8 entries can be defined 0x01 thru 0x08 PDO MAPPING R if SI SI0 W PREOP if SI 0 0x1A06 TxPDO Hot Cathode Default No default entries Can only write SI 0 0x00 0x1A07 TxPDO Hot Cathode User Up to 8 entries can be defined 0x01 thru 0x08 PDO MAPPING R if SI SI0 W PREOP if SI 0 0x1BFE TxPDO Combo Default Default inputs as defined by ETG 5003 2080 0x01 RW Active...

Page 14: ...O Communication Type Sync Manager 2 3 Process data output master to slave 0x04 USINT RO Communication Type Sync Manager 3 4 Process data input slave to master 0x1C12 RxPDO Assignment List of output PDOs 0x01 0x1A UINT R if SI SI0 W PREOP if SI 0 Index of PDO Mapping i e 0x17FF 0x1C13 TxPDO Assignment List of input PDOs 0x01 0x1A UINT R if SI SI0 W PREOP if SI 0 Index of PDO Mapping i e 0x1BFE 0x1C...

Page 15: ...dicates an error when the SI02 entry value changed 0x02 BOOL RW RX Process Control Emission User Mode Changes User Emission Mode Only sets a new mode if the new entry value is different from the previous value and the new entry value is one of 0x00 Sets the mode to Automatic returns ion gauge to secondary sensor control 0x01 Sets the mode to Manual if ion gauge is on turns off Updates object 0x803...

Page 16: ...exceeded 0x03 BOOL RO TX Underrange Exceeded Set to 1 if underrange exceeded 0x05 BOOL RO TX Emission Status Off On 0 Off 1 On 0x06 BOOL RO TX Degas Status Off On 0 Off 1 On 0x600E Input Trip Point 1 0x01 BOOL RO TX Status High Trip 1 High Trip asserted 0x02 BOOL RO TX Status Low Trip 1 Low Trip asserted 0x600F Input Trip Point 2 Trip Point 2 0x01 BOOL RO TX Status High Trip 1 High Trip asserted 0...

Page 17: ...S RW Active Filament Active sensor filaments Each bit represents a different filament 0x12 USINT B S RW Active Degas Filament Current active degas filament Each bit represents a different filament 0x16 UINT B S RW Degas Time on Interval Time degas is on in seconds 0x800E Configuration Trip Point 1 0x01 BOOL B S RW High Trip Enable High Trip Point 0 Disable 1 Enable If the Low Trip Point is enabled...

Page 18: ...imit to trigger trip point condition if Input Value is above this limit 0x14 REAL B S RW Low Trip Point Limit Low limit to trigger trip point condition if Input Value is below this limit 0x17 REAL B S RW High Trip Hysteresis Hysteresis value for High Trip Point 0x18 REAL B S RW Low Trip Hysteresis Hysteresis value for Low Trip Point 0x1A UDINT B S RW Source Index Choose Absolute Pressure or Differ...

Page 19: ...UINT RO Sensor Errors See Sensor Warnings and Errors 0x06 UINT RO Degas Time on remaining Remaining time for the current degas on cycle in seconds 0x07 UDINT RO Time Filament 1 powered in seconds 0x08 UDINT RO Time Filament 2 powered in seconds 0x900E Information Trip Point 1 0x01 REAL RO Input Value Trip Point 1 Trip Point input value as referenced by 800E 1A 0x900F Information Trip Point 2 0x01 ...

Page 20: ...800E F 01 1 the Trip Point will activate if the pressure p is greater than the Trip Point Limit P1 0x800E F 11 The Trip Point will switch from Active to Inactive if the pressure p is less than the Trip Point Limit P2 0x800E F 11 0x800E F 17 Sensor Warnings and Errors Each sensor has detailed warnings and errors in accordance with ETG5003 2080 as shown in Output Data of Modules Table 15 lists those...

Page 21: ...rnings 0 Not at temperature Not used 1 Electronics warning Not used 2 15 Reserved Not used Differential Piezo Errors 0 Sensor failure Invalid sensor voltage 1 Electronics failure Non volatile memory failure invalid internal communication 2 Electronics over temperature 3 14 Reserved Not used 15 Configuration exception Not used Heat Transfer Warnings 0 Reserved Not used 1 Electronics warning Not use...

Page 22: ...de Errors 0 Sensor filament 1 alarm Not used 1 Sensor filament 2 alarm Not used 2 Sensor filament 3 alarm Not used 3 Sensor filament 4 alarm Not used 4 Sensor filament 5 alarm Not used 5 Sensor filament 6 alarm Not used 6 Sensor filament 7 alarm Not used 7 Sensor filament 8 alarm Not used 8 Exceeded maximum C E ratio Not used 9 Electronics failure Non volatile memory failure invalid internal commu...

Page 23: ...ge Bit 31 16 0x0000 0x01 UDINT RO 2080 0x02 UDINT RO 2080 0x03 UDINT RO 2080 0x04 UDINT RO 2080 14 Value Range Setting Not Used 15 Exception Handling Data Contains information about Exceptions Error and Warnings Table 17 Exception Handling Data Objects Index Sub Index Data Type Backup B Save S Access PDO Assignable Name Description 0xF380 USINT RO TX Active Exception Status A condensed summary byt...

Page 24: ...cturer Error Bit 4 7 Reserved 0xF391 Latched Device Warning Details Expanded details of the SDP specific device warnings after masks are applied See Sensor Warnings and Errors 0x01 UDINT RO TX Absolute Piezo 0x02 UDINT RO TX Differential Piezo 0x03 UDINT RO TX Heat Transfer 0x04 UDINT RO TX Hot Cathode 0xF393 Latched Device Error Details Expanded details of the SDP specific device errors after mas...

Page 25: ...ntains Combination Pressure and other Device wide Status Table 18 SDP and CDP Device Specific Inputs Objects Index Sub Index Data Type Backup B Save S Access PDO Assignable Name Description 0xF640 Combination Gauge 0x01 BOOL RO Combination Gauge Reading Valid 1 Valid 0 Invalid 0x02 BOOL RO Combination Gauge Overrange Exceeded Indicates if gauge is out of range 1 Exceeded 0 In range 0x03 BOOL RO Co...

Page 26: ...nts the sensor type of the first module the second nibble corresponds to the second module and so forth 2 piezo 3 heat transfer 4 hot cathode 0x02 USINT RO Number of sensors Number of pressure sensors in this device 2 Heat Transfer 3 Hot Cathode 0xFF Unknown error 0xF641 Trip Point Output All Status of Trip Point instances 0x01 UDINT RO TX Trip Point Output All Instance Bit 0 Status High Trip 600E...

Page 27: ...Number 0x01 UDINT RO Common device profile functional generation number which this device supports 0xF9F2 SDP Functional Generation Number Current version is 2 x x 0x01 UDINT RO Absolute Piezo 0x02 UDINT RO Differential Piezo 0x03 UDINT RO Heat Transfer 0x04 UDINT RO Hot Cathode Ion 0xF9F3 STRING n RO Vendor Name MKS Instruments 0xF9F4 Semiconductor SDP Device Name String identifying the device ty...

Page 28: ...ibration Emission On Off Degas On Off and Reset functions Table 21 SDP and CDP Command Objects Index Sub Index Data Type Backup B Save S Access PDO Assignable Name Description 0xFB40 Zero Adjust Execution of this command will start a Zero Adjust operation 0x01 ARRAY 0 5 OF BYTE RW Command Byte 0 0 Zero Adjust with no offset 1 Zero adjust with zero offset Other values not supported Byte 1 Index of ...

Page 29: ...ex of the Sub Sensor Instance 0 Absolute Piezo Other values not supported Byte 2 5 Full Scale value Data format REAL 0x02 USINT RO Status 0 Last command completed no errors no reply available 1 Last command completed no errors reply available 2 Last command completed errors present no reply available 3 Last command completed errors present reply available 4 99 reserved for future use 100 200 indic...

Page 30: ... Last command completed errors present reply available 4 99 reserved for future use 100 200 indicates how much of the command has been executed in 100 0 200 100 201 254 reserved for future use 255 Command is executing if the percentage display is not supported 0x03 ARRAY 0 2 OF BYTE RO Response Byte 0 Same as sub index 0x02 Byte 1 Unused Byte 2 0 Degas ON OFF successful 1 Degas ON OFF failed unspe...

Page 31: ...N OFF failed unspecified reason 2 Emission ON failed because pressure too high 254 No previous Emission ON OFF command issued 0xFBF0 RO Device Reset Command Execution of this command causes the device to emulate a complete power cycle This includes an ESC reset NOTE As a consequence of an ESC reset all of the subsequent devices are disconnected from the network NOTE Reset can take up to 10 seconds...

Page 32: ...200 100 201 254 Reserved 255 command is executing if the percentage display is not supported 0x03 ARRAY 0 1 OF BYTE RO Response Byte 0 Same as sub index 0x02 Byte 1 Unused always 0 0xFBF1 Exception Reset Command Execution of this command clears the latched exceptions 0x01 ARRAY 0 4 OF BYTE RW Command Byte 0 0x74 Byte 1 0x65 Byte 2 0x73 Byte 3 0x65 Byte 4 0x72 0x02 USINT RO Status 0 last command co...

Page 33: ...e parameters automatically when they are written Bits 2 31 reserved always 0 Write All writeable non volatile values will be stored in non volatile memory when the following is sent Byte 0 0x73 Byte 1 0x61 Byte 2 0x76 Byte 3 0x65 If other values are written the Abort Code 0x06040043 Parameter is incompatible is returned 0x02 USINT RO Status 0 last command completed no error no response 1 Reserved ...

Page 34: ...1 1 CRC 32 Bit 2 0 MD5 not supported Bit 3 0 SHA 1 not supported Bits 4 6 Reserved always 0 Bit 7 0 other algorithm not supported Bits 8 31 Reserved always 0 Write Checksum Type Selection and Start Calculation A write access to this sub index shall only set one bit true in Bits 0 7 If other values are written the Abort Code 0x06040043 Parameter is incompatible is returned Bit 0 1 Use default check...

Page 35: ...W Command Read Bit 0 1 slave loads the non volatile parameters when writing 0xFBF4 01 with 0x64616F6C Bit 1 1 slave saves the non volatile parameters automatically when they are written Bits 2 31 Reserved always 0 Write All writable non volatile parameters will load from non volatile memory when the following is sent Byte 0 0x6C Byte 1 0x6F Byte 2 0x61 Byte 3 0x64 If other values are written the A...

Page 36: ...unication Protocol Manual p n 20018109 001 Rev B Index Sub Index Data Type Backup B Save S Access PDO Assignable Name Description 0x03 ARRAY 0 5 OF BYTE RO Response Byte 0 Same as sub index 0x02 Byte 1 Unused always 0 ...

Page 37: ... next troubleshooting step Severe electrical interference may cause communication loss resulting in an error state It is expected that the Master will evaluate this error clear the error and try to go the desired EtherCAT State over a timeout period before reporting a severe error to the rest of the system This behavior allows the system to recover Checking for Errors See Troubleshooting for diagn...

Page 38: ...ter than 0x01 than there is an error 0xFB40 03 may have more information Manual calibration of the Heat Transfer sensor is done by writing 0x00 0x02 0x00 0x00 0x00 0x00 to 0xFB40 01 Query 0xFB40 02 if the response is greater than 0x01 then there is an error 0xFB40 03 may have more information Full Scale Adjust Only the Absolute Piezo has a full scale adjustment This adjusts the Combination pressur...

Page 39: ...rrupted Try re loading firmware using Firmware Update PREOP ERR EtherCAT State with AL Status Code 0x1D or 0x1E Verify PDO Configuration is valid check if indexes with correct bit length are mappable Pressure is NaN or 0xF383 n Reports Electronics Failure This is most likely due to an internal issue in the electronics contact MKS for next steps Other Troubleshooting Contact MKS for support 27 SDO ...

Page 40: ...90033 101253171 Configured module list does not match detected module list 06090036 101253174 Maximum value is less than minimum value 08000000 134217728 General Error 08000020 134217760 Data cannot be transferred or stored to the application NOTE This is the general Abort code in case no further detail on the reason can be determined 08000021 134217761 Data cannot be transferred or stored to the ...

Page 41: ...ut mapping 0x0026 38 Inconsistent settings 0x0027 39 FreeRun not supported 0x0028 40 SyncMode not supported 0x0029 41 FreeRun needs 3Buffer mode 0x002A 42 Background watchdog 0x002B 43 No valid inputs and outputs 0x002C 44 Fatal sync error 0x002D 45 No sync error 0x002E 46 EtherCAT cycle time is smaller than minimum cycle time supported by slave 0x0030 48 Invalid DC Sync configuration 0x0031 49 In...

Page 42: ...38 EtherCAT Communication Protocol Manual p n 20018109 001 Rev B EtherCAT Communication Protocol Operation and Installation Manual MKS p n 20018109 001 Rev B October 2021 ...

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