MKS 946 Series, Operation And Maintenance Manual, Page: 51 / 130

946 Controller Instruction Manual pg. 51
5.0E+2
Pressure Control Parameter Setting Recipe
Prop - Kp
P Sp
1.0E+1
Integral - Ti
Derivative - Td
1.0E+1
1.5E+0
90.0%
Ceiling
0.0%
Start
End
Preset
30%
Direction
Upstream
R1 R2 R3 R4 R5 R6 R7 R8
B1 B2 C1 C2 Rat VLV NA NA
GainSchedBand
0%
SchedGainCoeff
1
C1
PID Ch P Ctrl Ch
A1
30.0%
CtrlStart
10s
Base
0.0%
Figure 6-14 Single MFC Control Recipe Setup Screen
The Base, Ceiling, Preset, Start and End are the percentage of the full-scale flow
rate of the MFC on the assigned PID channel, not the actual flow rate.
6.7.3.1.1 Set the Recipe for Single MFC PID Control
To edit and set a PID recipe, following steps are required to enter the PID recipe editing mode:
1. Press the
System
Setup
button, move the cursor to PID Recipe Edit (see Figure 6-4), then press
Enter
key to display the Pressure Control Parameters Setting Recipe screen shown in
Figure 6-14;
2. Press or keys to select a desired recipe for editing or displaying (highlighted by
grey background, such as C1 in Figure 6-14), then, press the Enter key to begin the
setup or edit mode. Any of the14 PID parameters and settings associated with a recipe
may now be entered or changed.
Only 4 parameters (P set point, Prop-Kp, Integral-Ti, and Derivative-Td) can be
modified while a PID recipe is actively running. The PID control must be stopped to
change any other parameters in an active recipe.
For non-active recipes, all parameters can be changed (either from front panel or serial
communication).
See Figure 6-14 for setting up MFC PID control recipe:
• PID Ch: PID Ch: This selects either the channel of the controlling MFC (single MFC
control) or method for automatically controlling the system pressure (ratio or valve).
a) When single MFC is used for pressure control, select and confirm with
Enter the channel where the MFC is connected.
b) When multiple MFCs are used for Ratio pressure control, select Rat and
confirm with Enter .