MKS 275420-1-GQ-T-00011 Instruction Manual Download Page 44

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6 Calibration

Series 275 Convectron Module with DeviceNet

Instruction Manual - 275502

Table 6-2

Data Values for Atmosphere Calibration

Altitude in
Feet - Above
Sea Level

Pressure in Torr
for N2 or Air

Decimal
Count Value

Hex Count Value

760

57440

E060

1000

773

57272

DFB8

2000

707

57110

DF15

3000

681

56932

DE63

4000

656

56755

DDB2

5000

632

56585

DD09

6000

609

56423

DC66

7000

586

56239

DBAE

8000

564

56049

DAF1

9000

543

55869

DA3C

10000

523

55696

D990

Summary of Contents for 275420-1-GQ-T-00011

Page 1: ...Series 275 Mini Convectron Vacuum Gauge Module with DeviceNetTM Digital Interface Instruction Manual Instruction manual part number 275502 Revision C September 2021...

Page 2: ......

Page 3: ...ule is provided on the following page Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit ou...

Page 4: ...vectron Gauge with Gold plated Tungsten Filament 275420 1 PQ T 00001 Convectron Gauge with Platinum Filament Replacement Convectron Gauges for the 2 modules listed above Gold plated Tungsten Filament...

Page 5: ...Chapter 4 Operation 21 4 1 Theory of Operation 21 4 2 Front Panel Indicators and Adjustments 22 4 2 1 Module MOD LED Status 22 4 2 2 DeviceNet Network NET LED Status 23 4 2 3 Process Control Relay Se...

Page 6: ...delines 45 7 2 Damage Requiring Service 46 7 3 Troubleshooting Symptoms and Possible Causes 47 7 4 Convectron Gauge Test Procedure 47 7 5 Cleaning Contaminated Convectron Gauges 48 Series 275 Convectr...

Page 7: ...ts in these instructions In these instructions the word product refers to the Mini Convectron Module and all of its approved parts and accessories NOTE These instructions do not and cannot provide for...

Page 8: ...xist unless all exposed conductors are maintained at Earth ground This hazard is not peculiar to this product 1 2 Damage Requiring Service Disconnect the product from all power sources and refer servi...

Page 9: ...ni Convectron Gauge is mountedis electrically grounded It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground Use a ground lu...

Page 10: ...le mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuumsystems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits...

Page 11: ...nd found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the eq...

Page 12: ...truction Manual 275502 1 7 Canadian users This Class B digital apparatus meets all requirements of the Canadian Interference Causing Equipment Regulations Cet appareil numerique de la classe B respect...

Page 13: ...tronics and gauge are packaged in an all metal package that provides a rugged enclosure and a high level of immunity to electrical noise The Convectron gauge used in the module is field replaceable Th...

Page 14: ...P20 Power required 11 5 Vdc to 26 5 Vdc 11 5 Vdc 0 22 A 26 5 Vdc 0 1 A 3 5 watts maximum Protected against reversals transients or over voltages Digital interface DeviceNet Baud rate 125K 250K or 500K...

Page 15: ...ual 275502 15 2 Introduction Specifications 2 3 Module Dimensions Figure 2 2 DeviceNet Mini Convectron Module Dimensions Table 2 1 Fitting Flange Dimensions Fitting Description Dimension H VCR type fe...

Page 16: ...2 Introduction Specifications 16 Series 275 Convectron Module with DeviceNet Instruction Manual 275502...

Page 17: ...filed with the airline not the freight forwarder All materials have been chosen for ultra high vacuum service corrosion resistance and bakeable to 150 C The gauge tube envelope is type 304 stainless s...

Page 18: ...e gauge tube Do not install the Mini Convectron where high amplitudes of vibration are present Excessive vibration will cause forced convection at high pressure giving erroneous readings Do not use a...

Page 19: ...ge is critical to obtaining reliable pressure measurements Long tubing or other constrictions can cause large errors in pressure readings If you mount the gauge near the pump the pressure in the gauge...

Page 20: ...wapping Doing so may cause damage to the equipment or severe electrical shock to personnel 3 3 I O Connector Wiring DeviceNet requires a 121 ohm terminating resistor to be installed at each end of the...

Page 21: ...ected by changes in ambient temperature The sensing wire is designated R1 in the Wheatstone bridge circuit The temperature compensator is designated R2 At bridge null the following equation applies Br...

Page 22: ...4 and 4 1 5 Figure 4 2 Series 275 DeviceNet Mini Convectron Front Panel 4 2 1 Module MOD LED Status Table 4 1 Series 275 DeviceNet Mini Convectron Module LED Status LED Status Off No Power to the modu...

Page 23: ...k Duplicate MAC ID or Buss Off 4 2 3 Process Control Relay Settings Use either of the two methods below to set the process control relay to the desired pressure trip point The first method sets the tr...

Page 24: ...d by the setpoint relay See Figure 4 3 NOTE The pressure settings and voltages listed in Table 4 3 are for use with Air or N2 ONLY Table 4 3 Pressure Torr vs Setpoint Voltage Pressure Torr Setpoint Vo...

Page 25: ...re will read the address switch settings Specific address values range from 0 to 63 Set the switch labeled MSD to a value of 0 to 6 for the most significant first digit Set the switch labeled LSD to a...

Page 26: ...4 Operation 26 Series 275 Convectron Module with DeviceNet Instruction Manual 275502 Notes...

Page 27: ...data Table 5 1 Polled I O Messaging Summary Instance Master data Device data Data type Description Type 1 None 00 00 UINT UINT vacuum pressure Open Note Unsigned binary is used to represent the posit...

Page 28: ...e Instance 1 is assigned to the Explicit Message Connection Instance 2 is assigned to the Polled I O Connection Table 5 4 and Table 5 5 show the attributes and the predefined values of each Table 5 4...

Page 29: ...x None 01 EPATH Get produced connection path Open 0Ehex 5 2 0Fhex None 06 00 UINT Get consumed connection path length Open 0Ehex 5 2 10hex None 00 EPATH Get consumed connection path Open Parameter Obj...

Page 30: ...sure Conversion Pressure Torr A D Counts decimal A D Counts Hex 0 0 0 0 0 0001 14 E 0 0002 30 1E 0 0005 78 4E 0 001 157 9D 0 002 311 137 0 005 749 2ED 0 01 1424 590 0 0193 2500 9C4 0 02 2515 9D3 0 05...

Page 31: ...5 DeviceNet Operation Series 275 Convectron Module with DeviceNet Instruction Manual 275502 31...

Page 32: ...5 DeviceNet Operation 32 Series 275 Convectron Module with DeviceNet Instruction Manual 275502...

Page 33: ...uctivity gauge The following books are useful reference volumes Dushman S Lafferty J M Scientific Foundations Of Vacuum Technique John Wiley Sons Inc Second Edition New York 1962 Redhead P A et al Ult...

Page 34: ...ure levels of some other gases For example N2 at 24 Torr causes the same heat loss from the Convectron sensor as argon will at atmospheric pressure If the pressure indication of the Convectron Gauge i...

Page 35: ...10 1 to 1000 mbar D2 Freon 22 Kr He 02 Note that 1 mbar 100 pascal so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves...

Page 36: ...ine up from the 10 Torr N2 equivalent indicated pressure to the Helium curve and then move horizontally to the left to reveal a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indi...

Page 37: ...10 4 10 3 10 2 10 1 Indicated Pressure Torr nitrogen equivalent Figure 6 1 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 Torr True Pressure Torr Use only when gauge axis is horizonta...

Page 38: ...gauge axis is horizontal Do not use this data with transducersother than the G P Series 275 Convectron Gauge Pressure units equivalence 1 m Hg 1 mTorr 1 x 10 3 Torr 1000 m Hg 1 Torr 10 2 10 1 1 10 In...

Page 39: ...Indicated Pressure Torr nitrogen equivalent 100 1000 Figure 6 3 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 Torr True Pressure Torr Use only when gauge axis is horizontal Do not us...

Page 40: ...2 air CO2 10 4 10 4 10 3 10 2 10 1 Indicated Pressure mbar nitrogen equivalent Figure 6 4 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 mbar True Pressure mbar Use only when gauge axi...

Page 41: ...10 2 10 1 1 10 100 Indicated Pressure mbar nitrogen equivalent 1000 Figure 6 5 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 mbar True Pressure mbar Use only when gauge axis is horiz...

Page 42: ...10 2 10 1 1 10 Indicated Pressure mbar nitrogen equivalent 100 1000 Figure 6 6 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 mbar True Pressure mbar Use only when gauge axis is horizo...

Page 43: ...ance 1 Attribute 1 Data 00 00 to zero the Mini Convectron Module See Table 5 6 If the base pressure is between 1 x 10 4 to 1 x 10 1 Torr use another gauge or pump specs to set zero For example If the...

Page 44: ...libration Altitude in Feet Above Sea Level Pressure in Torr for N2 or Air Decimal CountValue Hex Count Value 0 760 57440 E060 1000 773 57272 DFB8 2000 707 57110 DF15 3000 681 56932 DE63 4000 656 56755...

Page 45: ...packaging is the Buyer s responsibility For Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Vi...

Page 46: ...d by MKS or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Safety Check Upon completion of any service or repair...

Page 47: ...adout from the Mini Convectron is vastly different from that which is observed by supporting gaugeson the vacuum system The gas composition in the vacuum chamber may not be what the user believes it t...

Page 48: ...type 304 stainless steel All metallic joints in the envelope are welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy...

Page 49: ...43 D Damage requiring service 8 damage requiring service 46 E Environment for installation 19 examples 36 F FCC verification 11 G gas type selecting 33 Ground test 9 I Installation environment 19 loca...

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Page 52: ...Digital Interface Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www mk...

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