4. Ordering Information
VU – 0430N
-
A
CL -
02
P
N N
D01
T23
NNN
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[8] [9]
[10]
[1] Series model: VU: Vaporizer
VU Series
[2] Valve type
A: Control valve and Shut-off valve all-in-one
F: Shut-off valve all-in-one
[3] Carrier gas
CL: Carrier gas-less type
01: Carrier gas type 1
02: Carrier gas type 2
03: Carrier gas type 3
[4] Capillary
02: Capillary type 2
03: Capillary type 3
[5] Valve
P: Polyimide
E: PEEK
[6] Seal
N: Au
[7] Internal surface treatment
N: No treatment
M: Electrical polishing(EP)
[8] Heater
D01: AC100 to 120V
D02: AC200 to 240V
[9] Thermal switch
T23: 230±10°C
[10] Option
NNN: Standard specifications
※Notation other than NNN means customer options. The specification will be different
from this specification sheet, please refer to specific specification sheet. Please notice
that the pin assignment may be different as well.
5. Electrical Connection
(1) Heater / Thermal switch connector
Mounted connector : SRCN2A16-7P (JAE)
Pair connector : SRCN6A16-7S (JAE)
Pin No.
Signal name
1,2
Inner block heater power supply
3,4
Outer block heater power supply
5
Case Gnd.
6,7
Thermal switch
(2) Thermocouple connector
Mounted connector
: CMP03-K (RKC Instrument Inc.)
Pair connector : CMP01-K (RKC Instrument Inc.)
Pin No.
Signal name
K
Thermocouple (-)
+
Thermocouple (+)
(3) LM-VU connect cable
Mounted connector
: HR10-7R-4P (73)
Pair connector : HR10-7P-4S (73)
Pin No.
Signal name
1
Valve control signal
2
Valve control signal (-15VDC)
3,4
N.C.
6. Connection diagram
Fig2. Connection diagram (Heater specifications: D01: 120V)
Fig3. Connection diagram (Heater specifications: D02: 240V)
7. Preparation and Operational Procedure
(1)
Check the liquid type, and attach the VU fittings in the direction of the fluid flow.
(2)
Prepare a MFC for carrier gas (including power indicator and cable) and
connect it to the carrier gas lines.
(3)
Attach filters to liquids and carrier gases lines.
(4)
Prepare temperature control units and connect to the VU and outlet tubing
heaters.
(5)
Electrical connections should be made correctly, taking account of power
source voltage, polarity and capacity.
(6)
Supply power to the LM and the MFC, and warm-up for 30 minutes. Please
turn on the VU heaters and confirm that the temperature has reached the set
temperature after a period of 90 minutes.
(7)
Check that there are no leaks from the fittings using a helium (He) leak detector.
(8)
Evacuate and purge the tubing line, the
LC
and the VU to remove
moisture, thoroughly.
(9)
Thermal switch may work by temperature overshoot in the first operation.
Please adjust PID by auto turning.
(10) When using a liquid mass flow meter and carrier gas mass flow controller
together with this device to control and introduce liquid, vaporized gas will be
transported from the outlet.
(11) Please use helium (He) to pressure liquid (To lower the possibility of
generating bubbles).
(12) It is necessary to set the VU, line and carrier gas temperature as well as
carrier gas flow rates to appropriate values in order to meet the liquid physical
properties and process conditions.
8. Product Warranty
(1) Period
This product is guaranteed for a period of 1 year from the date of
shipment. Defects are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other
damage caused by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty .
1) Failure caused by by -product of liquid or gas used.
2) Failure caused by misuse (including careless operation), incorrect
repair or modification .
3) Failure cause by falling or dropping after purchase.
4) Failure caused by fire, earthquake, flood, lightning or other
natural disasters.
Even if the warranty period is still in effect, repair service may not
be provided in the following cases.
1) When the kind of fluid used in the product is unclear.
2) The product is returned with fluid remaining inside, and
safety cannot be confirmed .
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
Corporate Headquarters
4-1-23 Sekinotsu, Otsu City, Shiga Pref. 520-2277, Japan
TEL.
+81-(0)77-536-2210 FAX. +81-(0)77-536-2215
Tokyo Branch Office
3F Hattori Build., 4-30-14 Yotsuya Shinjyuku-ku Tokyo 160-0004, Japan
TEL. +81-(0)3-5366-2801 FAX. +81-(0)3-3341-3513
