Ion gauge cannot be turned
on
1. Pressure exceeds 1.00 x
10-3 Torr at 4 mA
emission
2. Pressure exceeds 5.0 x
10-2 Torr at 0.10 mA
(100 µA) emission
3. Emission Control not
functioning
1. Decrease pressure below required value
2. Decrease pressure below required value
3. Switch to the other filament
1. Front Panel Control - page 25 (SETUP IG -->
FILAMENT NUM --> FILAMENT 1/2)
2. RS485 - page 32
4. Ion gauge sensor is possibly contaminated.
1. Go into R&D Mode
1. MENU --> SETUP DISP --> MODE and select
RESEARCH. After going to top of menu, it
should display several things including FVI.
The first digits are filament voltage, the
second digits are current.
i.
If voltage > 1.7 V and current is > 2.5 A
at 100 uA setting, there is possible
contamination
ii.
If voltage > 2.3 V and current is > 2.7 A
at 4 mA setting, there is possible
contamination.
2. Degas sensor if values exceed limits from point 4
1. Degassing basic information, page 16 of
manual
2. Front Panel Control --> DEGAS ON
3. RS-485 - page 32 of manual
3. Re-check R&D Mode Values. If nothing changed,
sensor is contaminated.
4. Contact [email protected] with R&D values
1. Possibly need to replace the sensor
Research Screen shows
filament Voltage is present
but filament current stays
at 0
1. Filament is open
1. Switch to second filament
1. Front panel - page 25 (SETUP IG --> FILAMENT
NUM --> FILAMENT 1/2)
2. RS485 - page 32 of manual
2. Check the resistance between filaments 1 and 2 (page 37)
1. Remove the ion gauge transducer from the control
module (page 78, steps 1-5)
2. Measure the resistance using an ohmmeter; a good
intact filament will have a resistance of 0.2 ohms
(page 73 of manual
